| In this paper,a series of NbN-Ag,TaCN-Ag and Ti Ru N films which content with nobel metal(Ag and Ru)were deposited by magnetron sputtering technique.The microstructure,mechanical properties and tribological properties were characterized by X-ray diffraction(XRD),Raman spectroscopy,scaning electron microscope(SEM)and the spectrometer(EDS),transmission electron microscope(TEM),nanoindentater machine,ballon-disc tribo-meter surface,profilometer,scanning electron microscope and laser confocal scanning microscope equipment.The main research results are as follows:The research of NbN-Ag composite films with different Ag content showed that NbN-Ag films consisted of fcc-NbN,hcp-NbN and fcc-Ag phases.With the increase of Ag content,the hardness and elastic modulus of the composite film decreased gradually.When the Ag content was 19.9 at%,The film had the minimum hardness and elastic modulus with11 GPa and 100 GPa.At room temperature,with the increase of Ag content,the friction coefficient of the composite film decreases gradually,and the wear rate increases gradually.At 200-700 ?: with the increase of temperature,the friction coefficient and wear rate of NbN-Ag composite film with Ag content of 9.2at% increased first and then decreased,reaching the maximum value of 0.7 and 3.9×10-9mm3N-1m-1respectively at 300?;With The Ag content increased to 19.9 at.%.The friction coefficient of NbN-Ag composite film was kept at about 0.3,and the wear tare of composite film first increased and then decreased,reaching the maximum value of 7.2×10-9mm3N-1m-1at 300?;At the same temperature,the composite film with higher Ag content had lower friction coefficient and higher wear rate.Both Ag and Ag Nb O3 have an effect on the friction and wear properties of the films.The research of TaCN-Ag composite films with different Ag contents show that TaCN-Ag films were consisted of fcc-Ta N,hcp-Ta N,fcc-Ag and amorphous phase C and CNx.With the increase of Ag content,the hardness and elastic modulus of the film first increased and then decreased.When the Ag content was 0.3 at.%,the hardness and elastic modulus of the film reached the maximum values with 30.4GPa and 336.2GPa.At room temperature,with the increase of Ag content,the friction coefficient of TaCN-Ag composite film increases first and then decreases,the wear rate decreases first and then increases.Otherwise,When the Ag content is 12.7 at%,The addition of Ag can reduce thefriction coefficient of the films from RT to 600?,the wear rate increases.At the same temperature,the friction coefficient of the TaCN-Ag composite film was smaller than the Ta CN film,but the wear rate is larger than the Ta CN film.At different temperature,Ag,Ag2Ta4O11,Ag Ta O3 and other phases effect the tribological properties of the film respectively.The results show that when the Ru content was lower than 1.3 at%,the composite film was composed of a single fcc-TiN phase.When the Ru content was higher than 1.3 at%,the composite film composed of fcc-TiN and hcp-Ru.With the increase of Ru content,the hardness and elastic modulus of Ti Ru N composite film first increased gradually and reaching the maximum value of 25 GPa and 250 GPa.when the Ru content was 1.3 at.%,with the increase of Ru content,the hardness and elastic modulus of composite film began to stabilize around 25 GPa and 250 GPa.At room temperature,with the increase of Ru,the friction coefficient of the film first decreases and then increases.When the Ru content was6.7 at.%,the friction coefficient reached the lowest value of 0.45.At room temperature,At room temperature,when the Ru content is more than 0.9 at.% the friction coefficient of Ti Ru N films starts to be smaller than that of TiN film.When the Ru content is 6.7 at%,the friction coefficient of films reaches the lowest value,which is 0.43.The wear rate of Ti Ru N composite films with different Ru content is lower than that of TiN films. |
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