Study On Microstructure And Mechanical Properties Of TaN/TiSiN Multilayer Films

With the continuous progress of manufacturing technology,the cutting environment of tool become more complex and diverse,so tool coatings need higher properties.In order to improve and enhance properties of the material,one or more layers of film that is different from the base material can be deposited on the surface of the material.Multilayer films have attracted wide attention due to their excellent properties.A series of TaN/TiSiN multilayer films with different Si contents and different modulation periods were prepared using JCP-350M2 high-vacuum multi-target magnetron sputtering coating machine.X-ray diffractometer,scanning electron microscope,nano indentor and other equipment were used to characterize the prepared films.The effects of element content and modulation period on the microstructure and mechanical properties of TaN/TiSiN multilayer films were studied,and their high temperature friction and wear properties were studied.The results show that:(1)TaN/TiSiN multilayer films with different Si contents all show preferential orientation on the(200)crystal plane.As the Si content increases,the(200)crystal plane shifts to the right.When the Si content of the Ti Si target is 10 at.%,the maximum hardness is 25.85 GPa.When the Si content of the Ti Si target is 15 at.%,the surface roughness is at least 2.34 nm,and the friction coefficient is the smallest,and the wear resistance is the best.(2)TaN/TiSiN multilayers with different modulation periods all show preferential orientation on the(111)crystal plane and(200)crystal plane.When the modulation period is 25 nm,the intensity of the diffraction peak is the strongest,the degree of crystallization is the best,the hardness is the largest at 25.23 GPa,the surface roughness is the lowest,the surface is the smoothest,the friction coefficient is the smallest,and the wear resistance is the best.(3)The TaN/TiSiN multilayer films at different temperatures all exhibit preferred orientation on the(200)crystal plane.When the temperature is 100 ?,the friction coefficient is the smallest and the wear resistance is the best.At normal temperature,100 �C and 150 �C,the friction coefficient curve has little fluctuation,and the sliding friction wear process is very stable.At 200 �C and 250 �C,the friction coefficient curve fluctuates very sharply due to the higher roughness.