Research On Micro-nano Structure Imaging Compound Control System Technology

Since the 20 th century,with the in-depth research of nanotechnology,nanoscale components have been widely used.As an important tool for the research of nanotechnology,nano imaging control system has a small imaging depth,which severely limits the application range of nano imaging control system and hinders the further development of nanotechnology.In order to improve the imaging depth of the nano imaging control system.Firstly,the micro nano structure imaging composite control system which combines the coarse displacement imaging platform and the fine displacement imaging platform is built.Then,the mathematical model of the compound control system is established by using the method of constant voltage value.At the same time,in order to improve the dynamic performance of the composite control system,the adaptive fuzzy control method is used to optimize the PI parameters.Finally,the feasibility of composite control system and control method is verified.The imaging experiment results show that the composite control system can realize the imaging of micro nano structure samples,and the imaging depth can reach 1300 nm.Compared with the nano imaging control system,the imaging depth is improved,and the grating structure is clear,and the overall and edge information is relatively complete.The quality of the grating image obtained by the adaptive fuzzy PI control method is better than that obtained by the PI control method.The micro nano structure imaging composite control system studied in this paper not only retains the imaging accuracy of the precision displacement imaging platform,but also improves the imaging depth by using the coarse displacement imaging platform,realizes the omni-directional presentation of the surface morphology of the deep samples,and greatly expands the application scope of the micro nano structure imaging composite control system.