Accuracy Analysis Of Micro-lens Array Mold Manufactured By Indentation Process

indentation experiments are carried out to verify the relationship between the shape of the indenter and the shape of the micro-lens unit as well as the surface quality of the micro-lens unit,it's found that the surface defects of the indenter can be duplicated on the micro lens and the surface will be rougher if the indentation depth is larger.Then,the distribution of residual stress and strain and the form accuracy of MLA mold in multi-indentation are simulated and verified experimentally.Compression deformations under different pitches are investigated and critical pitch is obtained.Finally,indentation process with multi-indenter to form several dimples in a time is proposed to manufacture MLA mold at pitches smaller than critical value with high accuracy.