| Optical components with complex surfaces or microstructures are more and more widely used in martial and civil fields. For example, micro-lens array in infrared detector and freeform prism in military headpiece can greatly improve integrative performances of optical system. Complex surfaces or microstructures can be manufactured by using ultraprecision fast tool servo (FTS) system with high dimension accuracy, high figure accurary and low surface roughness. Whereas machining accuracy of microstructure is influenced by many factors, the relationships among these factors are very complex, and little research reports are found.In the dissertation, accuracy analysis and design of optical microstructures are studied on the basis of machining characteristics of ultraprecision FTS system. The main contents are expressed as follow:1) Base on the structure constitution, dynamic characteristics and cutting parameters of FTS system, the processing model between control signals and tool displacement is built, and the forming model of complex surfaces or microstructures is built and analyzed. Furthermore, these influencing factors on machining accuracy of microstructure are studied.2) According to the machining characteristics of typical microstructures by FTS system, the inflence of tool interference on machining accuracy is studied, and the design principle of tool parameters is presented.3) The over-cut of microstructures is studied in the process of FTS machining. In order to improve machining accuracy, the algorithm design of tool compensation is achieved in the machining process of micro-lens array. Besides, the processing software is programmed.4) Two kinds of micro-lens array which have different arranging form are machined by using ultraprecision FTS system. Furthermore, the machined surfaces are tested and analyzed, and the results indicate that machining accuracy of micro-lens array is obviously improved, which can satisfy the application requirements.
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