Application Of Piezoelectric Technology In Chip Heat Dissipation And Accelerometer

Piezoelectric materials have captured enormous attention due to the attrative properties.The accelerating development of micro-electromechanical systems(MEMS)technology has significantly spurred the wise spread of micro-piezoelectric devices in a variety of potential fields.In this work,the application of piezoelectric technology in microchannel chip heat sink and micro accelerometer have been comprehensively investigated.The first part presented a comprehensive introduction of the research progress in micro-sized piezoelectric pump,heat dissipation device and micro accelerometer at home and abroad.The second part focused on the research progress of piezoelectric materials.Started from the free vibration of circular plate,the principle of piezoelectric ceramic traveling wave and driving fluid were then analyzed.The mechanical analysis,harmonic response analysis and fluid-solid coupling analysis of the target piezoelectric ultrasonic pump were carried out by ANSYS simulation software.The optimization of the piezoelectric ultrasonic pump was realized by studying the relationship between the size with output flow and working frequency of the piezoelectric ultrasonic pump.The simulation results showed that the flow rate of the optimized micro-piezoelectric ultrasonic pump can reach up to 204.9 mm3/s.It is found that the fluid properties and driving power of the ultrasonic pump could influence the flow rate to a certain extent.Based on the input flow of the ultrasonic pump,the structure of a microchannel radiator was designed,and the heat dissipation effect of the device was optimized by the simulation.The structure and circuit connection mode of the micro-piezoelectric accelerometer with three-axis inspection were designed in the fourth part.The working bandwidth and sensitivity of the piezoelectric accelerometer were analyzed from the theoretical and simulation perspectives.The sensitivity and first-order natural frequency of the micro-piezoelectric accelerometer were calculated.Finally,the relationship between the performance of micro-piezoelectric accelerometer and its structural size were studied.Experimental results showed that the charge sensitivity is inversely proportional to the length of the cantilever beam,but it is proportional to the height of the cantilever beam and the thickness of the piezoelectric film.The width of the cantilever beam is independent of the charge sensitivity and the first order natural frequency is inversely proportional to the charge sensitivity.