Method And Application Of Roll-to-Roll Spatial Atomic Layer Deposition

Flexible electronic technology is an emerging technology with broad prospects for development.However,due to the fact that some flexible electronic devices are particularly sensitive to moisture and oxygen in the air,the lack of longevity has always been a major bottleneck that restrict its development.In view of the poor properties to block out the water and oxygen of flexible substrates in air,this paper proposes a method of depositing alumina barrier films on flexible substrates using Spatial Atomic Layer Deposition(SALD)technology.At the same time,a roll-to-roll SALD device was designed and fabricated to realize the deposition of barrier films on large-area,continuous-flexible substrates under atmospheric pressure and low temperature conditions.This work mainly contains following aspects:(1)Based on the roll-to-roll process characteristics,a SALD equipment with a flexible material as a substrate was designed.This equipment mainly includes the drive section,tensioning section,tension detection and correcting mechanism which are required to realize the roll-to-roll basic movement,as well as the nozzle,air path,and heating are also needed to implement the SALD function.A nozzle height adjustment device was designed to control the size of the micro-gap between the nozzle and the substrate;temperature compensation was added to improve the stability of the reaction temperature.(2)The main factors that affect the vibration are analyzed,and the parameters are controlled to avoid the vibration of the substrate.The measurement method of the thin film on the flexible transparent substrate was studied,and the measurement of the alumina thin film on the flexible substrate using the ellipsometry instrument was realized.The roll-to-roll apparatus was used for film growth.By analyzing the influence of parameters such as temperature,speed,and tension on the film formation quality,the process parameters were optimized to enable rapid and stable film growth.(3)The anisotropy in the growth process of the thin film was studied.And the optical properties and mechanical properties of the alumina film grown on the flexible substrate were analyzed using the transmittance test and the nanoindentation experiment.