Laser-driven MEMS Device Simulation And Depth Optimization

MEMS technology is a new discipline developed in the 20 th century.It is a comprehensive technology involving many disciplines such as mechanics,electronics,biology,chemistry,optics,and physics.With the development of micro-nanotechnology,the economic benefits brought by this discipline have become more and more obvious.People from all walks of life are paying more and more attention to this subject.In this paper,laser is used as the driving force of MEMS devices in the following aspects:(1)The development of MEMS devices and the driving principles of MEMS are introduced in detail.The various stages of MEMS design are introduced,and the focus of this article is device simulation of MEMS structures.List the driving principles of different methods and compare the advantages and disadvantages of each driving method;(2)The principle of laser and material action and the modeling process of finite element are explained in detail,and the physical model of heat transfer by laser drilling is established.The principle of laser and material action and the modeling process of finite element are explained in detail,and the physical model of heat transfer by laser drilling is established.The heat transfer model of MEMS device is constructed,and the temperature distribution and thermal stress caused by heat transfer are analyzed,which lays the foundation for the laser driven model below.(3)A laser-thermal-driven two-layer cantilever beam model based on micro-scale thermal expansion effect is proposed.Using the laser as the heating source,coupled to the mathematical model of the bending of the double cantilever beam,a physical model of the one-dimensional laser heating double cantilever beam to generate the vertical displacement was deduced.According to the laser parameters,the theoretical relationship between laser power and vertical displacement is calculated.The simulation results using COMSOL software show that there is a linear relationship between laser power and vertical displacement.A simulation model of a laser-driven two-layer cantilever beam structure was constructed,and the vertical displacement model of the laser power and the double cantilever beam structure was obtained.The linear relationship between laser power and vertical displacement was obtained.(4)The neural network model was introduced to deeply optimize the entire model,making the entire modeling process more efficient and concise.The physical equation of stress and strain of the flywheel was established to obtain the stress distribution curve of the flywheel rotation.The neural network model is introduced into the optimization of the flywheel structure,and compared with the results obtained from the finite element model,the optimal flywheel structure profile is obtained.The method of neural network was introduced into the depth(5)optimization of MEMS device simulation.The results show that the optimization model constructed using neural network is more simple and the whole design process is more efficient and concise.