| Studying the dynamic characteristics of MEMS(Micro-Electro-Mechanical System)devices has a great significance to promote the industrialization development of MEMS.This subject adopted the method of experimental physics,designed and manufactured a kind of capacitive MEMS accelerometer,then built the MEMS accelerometer test platform,used electrical measuring method and optical measurement method to study the dynamic characteristics of MEMS accelerometer separately.The test results will play a positive role on designing MEMS structure,processing MEMS devices,and the MEMS dynamic characteristics test method.Work of this paper has been formed by the following four aspects:Firstly,this paper designed a "double side-four beam" capacitive MEMS accelerometer structure,analyzed the MEMS accelerometer parameters such as stiffness,damping and natural frequency upon Newtonian mechanics,and some analyses got validation in the finite element analysis software ABaqus simulation.Next,fabricated the MEMS accelerometer devices based on photolithography,enhancement,stripping,magnetron sputtering,dry etching and other MEMS process technologies;and completed other preparation work before measurement.Furthermore,built the MEMS accelerometers dynamic characteristics test platform.The test platform can adjust,maintain and show ambient temperature and pressure values where the accelerometer in.Finally,Paper placed the MEMS accelerometers into dynamic characteristic test platform,using piezoelectric plate excited accelerometers,adjusted device of the parameters such as temperature and pressure at the same time,used LDV studying dynamic properties of MEMS accelerometer.The measured result conforms with the model of the accelerometer established on Newtonian mechanics,and according to the result,pressure had a great impact on the accelerometer dynamic characteristics. |
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