Advanced Control Strategy Research And Application For MEMS Micromirror

Based on super-precision machining and a variety of different domain knowledge(such as microelectronics,new materials,new energy,control theory,communication theory,etc.),Micro-Electro-Mechanical-System(MEMS)is a type of Micro-mechanical electronics for specific functional tasks.Similar to those ordinary closed-loop electro-mechanical systems,MEMS mainly includes components including sensors,a central processor,actuators,and a core object.Micro-electro-mechanical systems have many advantages in many industrial fields such as mobile phones,automobiles,and airplanes due to their low cost,ease of mass production,high integration,and simple structure.In the actual industrial production,because of the restriction of safety,cost and other factors,in order to ensure the robustness in practical use,the performance of the device will certainly be limited.A common example is a MEMS electrostatic micromirror.If the control input voltage is too large,it will trigger its pull-down phenomenon,causing the mirror to collide with the bottom electrode.Therefore,the input voltage can only be limited,but it also limits the scope of its deflection.Another similar example is the MEMS electromagnetic micromirror studied in this paper.Due to driving coil material limitations,its input voltage is also limited.Previously,while solving similar practical problems,most of the research work has focused on the improvement of manufacturing processes or device structures.The main idea of this paper is to design corresponding control strategies for specific problems.The major work of this article are as follows:Firstly,For the problem of uncertainty in the micromirror mathematical model,based on the linear robust output regulation theory,a robust controller is designed to solve the problem of accurate robust tracking of external sinusoidal signals on the premise of model uncertainty.Secondly,For the micromirror magnetic driver,there is output limiting and the controller is designed based on the compound nonlinear feedback theory.Under the premise of output limiting,transient response enhancement and precise determination point control are realized.Thirdly,There is output limiting for the micromirror magnetic driver.The controller is designed based on the compound nonlinear feedback theory.The transient response enhancement and precise deterministic point control are realized on the premise of output limiting.Finally,based on the MEMS optical system platform of the School of Automation,South China University of Technology,the author verified the validity of the research work in thispaper.The experimental results show that the controller designed for three specific problems in this paper solves the corresponding problems well.