Development Of Long Stroke Fast Tool Servo Device Based On Hydrostatic Guide Way

With the wide application of non-rotational symmetry optical elements in various fields,for a non-rotational symmetry elements having a surface height difference of the order of millimeters,the existing fast tool servo processing of the stroke is not enough available,the slow tool servo processing frequency is low and the processing cycle is too long.Therefore,the research of a new high-frequency response,long-stroke fast tool servo device has become an important part of the ultra-precision tool servo research.In this dissertation,a long stroke fast tool servo device based on hydrostatic guide way is studied,which is directly by the voice coil motor,and has no intermediate links,which has the advantages of long stroke and high frequency response.It is suitable for the machining of such non-rotational symmetrical elements having a surface height difference of the order of millimeters and has great significance in the production practice.The main contents of this dissertation include:1)To carry out theoretical research of the hydrostatic guide way.After analyzing the structure types of the guide way and the type of the type of the throttle,the constant pressure oil supply guide way structure with small orifice is selected.After theoretical analysis the bearing capacity of a single oil cavity and the oil cavity opposed,the opposed oil chamber in different displacement rate and liquid ratio of the dimensionless load capacity and dimensionless oil film stiffness curve was drawn,which provides theoretical support for the follow-up data analysis.2)According to the main design parameters,completed the whole design of the fast tool servo device.And then the structure of the guide way system was designed.By comparison of the two different oil chamber bearing modes,the structure,material and basic dimension of the guide way were determined,and the weight reduction was optimized to meet the design requirements.Based on the design of the drive system,the main components of the drive system were selected.3)The ANSYS Workbench analysis software module was used to analyze the static performance of the guide way to observe whether the deformation and stress distribution under the static load meet the design requirements.And then through the modal analysis of the first six steps to determine whether the system will appear resonance phenomenon within the normal working range.The bearing performance and flow filed distribution of the guide way were analyzed by Fluent module to verify the rationality of the design.4)According to the processing requirements of different parts of the system,different processing schemes were designed.And the surface profile of the core components of the rail system after machining was measured.The measurement results show that the PV value of the working surface is less than 2 wavelengths,which is less than the 1/15 of the design space of the guide way,which can meet the design requirements.The design of the whole assembly scheme of the fast tool servo device was put forward,and the precautions in the assembly process were put forward to ensure the success and safety of the assembly.Completed the system experimental platform to build,the static performance was tested to verify the feasibility of the design.