Research On Control Technology Of Compliant Ultra-precision Positioning Platform

With the development of society and the progress of technology,the scope of human research has gradually entered into the micro field.The research progress of micro positioning technology directly determines the level of development of microsphere.Therefore,the study of micro-nano positioning technology can effectively promote some fields to advance,such as integrated circuits,aerospace,biomedical,precision assembly,and special processing.Nowadays,the mainstream micro positioning technology is based on a flexibly positioning platform connected with a servo control system.Thus,the development of the micro-positioning technology mainly depends on the structural design of flexible positioning platform and the study of the servo control technology.Based on the performance of index required by the micro positioning servo system,this thesis designs a matching servo control system,which is depended on the previous research results,namely the two-dimensional ultra-precision positioning platform.Firstly,the design principles and working principles of the compliant precision positioning platform are introduced,the main components of the flexibly positioning platform are analyzed in a static way,and the single-degree-of-freedom motion of the platform is dynamically modeled,then the material selection of the positioning platform,the prototype processing,and the natural frequency test are completed.Secondly,a feasible closed loop control scheme is designed for the micro positioning platform,the key equipment of the control system is selected,and the mathematical model of a voice coil motor is built depending on its working principle.In addition,a suitable decoupling control strategy is designed for the micro positioning servo control system.By analyzing the insufficiency of the traditional PID control algorithm and combining the control requirements of the micro positioning platform,some improvement measures are proposed,the simulation and verification of the control algorithm are performed and the implementation is demonstrated by using LabVIEW.Finally,the influence of random noise of the servo system is analyzed,a complete wiring and grounding scheme are designed for the micro-positioning servo control system.On this basis,the noise of the system is further reduced by using a oversampling mean filtering method,and the step response experiments,displacement resolution experiments,and two-axis linkage experiments of the micro-positioning platform are completed.