| With the development of science and technology and the cross-integration of new materials,new energy and other disciplines,especially the continuous development of MEMS and ultra-precision,higher requirements are put forward for mirror deflection mechanism used in astronomical telescopes,laser marking,laser engraving,optical scanning mirrors,free space optical communications and other equipment.However,the traditional mirror scanning system has many problems,such as large volume,small deflection displacement,high cost,high driving voltage and bulk,which greatly limit its application.How to achieve the coexistence of large stroke and high accuracy has become the focus of academic research around the world.By using the fast response and high precision characteristics of giant magnetostrictive materials,combined with the advantages of linear motor's large stroke and high speed,the coexistence of high precision and large stroke can be realized.This paper make full use of the characteristics of Giant Magnetostrictive Material(GMM)such as wide working frequency bandwidth and high energy density,and studies the mechanism of the positive and negative effects of GMM,then designed a kind of micro displacement actuator-Giant Magnetostrictive Actuator(GMA),basing on the Jiles-Atherton model of the domain wall theory of ferromagnetic materials,the change process of physical mechanism in the magnetization model is analyzed,and the relationship between input and output(hysteresis between magnetization and magnetic field intensity)of GMA system under the action of magnetic field is established.The micro-displacement amplifying mechanism is designed with flexible hinge as the unit.The force and displacement of the displacement amplification mechanism was simulated by COMSOL Multiphysics multi-physical field coupling method.The amplification factor of the amplification mechanism is about 9.53,and the magnification obtained by the experiment is about 9.57.The error between the finite element simulation and the experimental value is about 0.4%,which verifies that the designed structure can effectively amplify the input micro-displacement.Finally,the macro motion platform with PMSM as the first-stage actuator and the micro-motion platform with GMA as the second-stage actuator was manufactured.Based on the theoretical analysis of the working mechanism and basic characteristics of PMLSM and GMA,their mathematical models are established respectively.According to the model,a dual-stage driving experimental system is built,and the dual-stage positioning system is experimentally studied and tested under the conditions of high speed and high acceleration.The results show that the positioning accuracy is greatly improved by adding GMA's macro-micro dual-stage driving system,which reduces from 8.339 ?m to 0.8719 ?m.The advantages of the designed macro-micro dual-stage positioning platform are verified.The dual-stage system can realize the movement of large stroke,high precision and high acceleration,and can meet the development needs of large stroke and high precision in the field of mirror deflection system.This paper makes a preliminary study on the macro-micro dual-stage driving and positioning system,which lays a foundation for further research(high-precision,large-range dual-stage system),and also provides theoretical and practical experience for reference in the related fields such as fast reflector system. |
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