Coaxial Integrated Design And Characteristic Analysis Of Macro Micro Composite Driver

Ultra-precision machining technology is one of the key technologies in the development of manufacturing industry in China.Its technical level is closely related to the development of national manufacturing industry.It has been widely used in national defense,biomedicine,transportation and daily life.The performance of the driver in ultra-precision machining equipment directly affects the product quality.Although the macro and micro composite driving mode can solve the contradiction between large stroke and high positioning precision,it produces Abbe error in displacement measurement.Therefore,combining the large stroke and high response speed characteristics of voice coil motor with the high positioning accuracy of giant magnetostrictive driver,a coaxial integrated design scheme of macro and micro composite driver is proposed in this paper.The main work of this paper is as follows:(1)In this paper,a coaxial integrated design of the macro-micro-composite driver is proposed.The macro-micro composite driver comprises a macro-moving part and a micro-motion part,wherein the macro-moving part of the macro-dynamic part is based on a voice coil motor,a permanent magnet and a macro-moving coil and the like of the macro-moving part are designed,And then the macro-power is theoretically derived according to the parameters of the macro-moving coil and the macro-dynamic current.Based on the excellent performance of the super-magnetostrictive actuator with the high positioning accuracy and the like,the super-magnetostrictive rod and the micro-coil and the like of the micro-motion part are designed,and the super-magnetostrictive rod is selected,and the output force is theoretically derived according to the performance parameters of the super-magnetostrictive rod.(2)The magnetic field modeling and feasibility analysis of the macro-micro-composite driver.The magnetic field model of the macro-dynamic coil,the magnetic field model of the micro-coil and the boundary condition of the magnetic field of the macro-micro-composite actuator are established based on the Maxwell equations.Based on the finite element method,the magnetic circuit,the macro-power and the micro-magnetic field strength of the macro-micro composite driver are analyzed by using the ANSYS Maxwell software,The feasibility of the coaxial integrated design of the macro-micro-composite driver is verified.(3)In order to reduce the degree of macro dynamic fluctuation,the size parameters of macro coil and tile permanent magnet in the driver are optimized in order to reduce the vibration of the driver in the process of macro dynamic positioning.At the same time,the optimum size of macro-moving coil and tile permanent magnet is obtained by orthogonal test.By analyzing the positioning accuracy of macro motion in the process of fretting positioning,in order to reduce the wave power,the size of fretting coil is simulated and optimized,and the optimum size of fretting coil is obtained by means of orthogonal test.(4)According to the designed driver structure,the dynamic models of macro positioning process and fretting positioning process are established respectively.The macro dynamic process of driver is simulated by ADAMS software,and its response speed is obtained.At the same time,the fretting output displacement of the driver is simulated and analyzed by using the magnetic coupling field module of COMSOL Multiphysics software,and the stroke of fretting positioning is obtained.Figure[50] Table[13] Reference[71]...