Research On Ion Beam Fabrication Path Optimization And Implementation

Ion Beam Fabrication technology is a high-precision polishing method that uses Ion Beam to bombard the surface of optical components based on computer-controlled optical surface forming theory.It has many advantages such as high precision,zero contact and zero stress.etc.It has a promising application prospect in the field of optics.However,there are a multitude of problems,such as high processing cost and long processing cycle,which greatly limits its development.In view of the many problems existing at this stage,this paper studies the optimization of Ion Beam Fabrication path,aiming to explore a low-time,high-precision optimization path for Ion Beam Fabrication,and providing theoretical and technical guidance for mass production of Ion Beam Fabrication.The main research work and conclusions of this paper are as follows:Firstly,the principle of the mathematical model of the removal function is expounded.The actual model of the removal function is obtained by the single point test method.The removal function is fitted by the non-linear least squares method,and the correlation coefficient of fitting accuracy is evaluated.The conclusion is drawn as follows: peak removal rate A=131.385 nm/min,Gaussian distribution parameter ? =2.7683 mm,correlation coefficient ? =0.9665.Secondly,according to the Gaussian-type removal function superposition theory model,the variation of the volatility after superposition is studied.It is concluded that the volatility of the superimposed interval is between 2⁵.1??,and the volatility is below 3%.Then,based on the grating path,the data group area is divided into the optical component surface error data,and the relationship between the data group area division range and the superimposition spacing is r =2^1/22n?.The average value of all the surface error data in each data group is taken as the height value of the data group,and the lowest value of the optical component surface error data is used as the processing threshold to calculate the height value to be removed by each data group,and the peak removal rate A is 131.385nm/min calculates the processing time that each data group needs to stay,and then performs path optimization simulation removal.The simulation results are as follows: RMS = 0.3797 ?m of the initial shape error data,PV = 1.977 ?m,RMS = 0.014 ?m,PV = 0.068 ?m.Finally,the NC code is generated to control the three-dimensional guide rail equipped with the Ion Source to complete the path scan of the Ion Beam to the sample,and complete the material modification.The experimental results are as follows: RMS=0.3797 ?m of initial surface shape error,PV=1.977 ?m,RMS=0.017 ?m,PV=0.079 ?m.