Design And Analysis Of Permanent Magnet Assisted Synchronous Reluctance Motor For Vacuum Pump

The semiconductor integrated circuit industry directly affects the overall technological level of a country.The production of integrated circuits requires a vacuum environment,and the vacuum environment could be obtained by various of equipments.The vacuum pump now applying at vacuum-acquisition devices with high pumping speed,low vibration,easy operation,and stability et al.With the rapid development of high-paying technology industry,the research and development of vacuum pump equipment has received corresponding attentions.The drive motor as the power source of the vacuum pump directly affects the pumping speed,ultimate vacuum,and vibration noise of the vacuum pump.And such performance would directly affect the quality of the semiconductor production.There is no doubt that the performance of the motor would directly affect the performance of the vacuum pump.At present,the driving motor in the industrial field is mainly composed of asynchronous motor and permanent magnet motor,but it remains so many problems such as its low efficiency and dependence on rare earth materials.However,by compositing the advantage of permanent magnet motor and reluctance motor,the permanent magnet auxiliary synchronous reluctance motor could provide high performance,high cost performance,and can be adjusted in a wide range,which conforms the requirements of the drive motor for vacuum pumps..This thesis will introduce the design and analysis of permanent magnet assisted synchronous reluctance motor for vacuum pump.And the main contents are as follows:Firstly,the electromagnetic design scheme of the permanent magnet auxiliary synchronous reluctance motor for vacuum pump is introduced.The winding mode of the stator and the number of poles of the motor are determined by comparison.Combined with the engineering practice,the material of the permanent magnet of the motor is ferrite,and the magnetic barrier structure of the motor rotor of the is analyzed and designed.The parameters of the motor are obtained by finite element calculation of the designed motor,and the rationality of the motor design theory is verified.Secondly,the various losses of the motor are calculated.By modeling in a commercial software,the iron loss of the rotor and stator of the motor is obtained.The high-frequency copper loss of the motor is calculated considering the skin effect and proximity effect of themotor winding wire at high frequency;The ferrite is used as the rotor for the motor.In the case of a magnet,the eddy current loss generated on the permanent magnet under the action of a high-frequency alternating magnetic field and the mechanical loss of the motor.Through the comprehensive calculation and analysis of the various losses of the motor,the force energy index of the motor is obtained,and the high performance of the motor is verified.Thirdly,based on the basic theory of heat transfer,the temperature field of the motor is solved,and the temperature rise results of the whole motor and various components are obtained.The simulation results show that the temperature distribution of each part of the motor is reasonable.By comparing the water flow of the motor cooling waterway,the optimal water flow of the motor is determined.And the influence of the cooling water channel size on the overall temperature rise of the motor is analyzed.In addition,the optimal cooling water channel size is obtained,and the optimal cooling system of the motor is determined.Finally,the finite element calculation is carried out to analyze the mechanical strength of the motor rotor he.And the force and deformation of the rotor after the motor reaches thermal stability are observed.Through analyzing of motor stress simulation results,the stress distribution of the motor and the deformation of the rotor of the motor are obtained.The influences of the filler on the rotor of the motor and the thickness of the bridge wall on the maximum stress of the rotor are analyzed,leading to the most reasonable barrier wall thickness.