The Design And Analysis Of Vacuum Pump Caned Motor Used In Semiconductor Equipment

With the increasing level of science and technology in our country and the rapid development of semiconductor, chemical, pharmaceutical and other industries, more and more industry require clean vacuum environment as its production base. This paper design the canned motor for domestic vacuum pump unit JGH-1000 A. Because of the larger stator copper loss and eddy current loss, the efficiency of canned motor is lower than ordinary asynchronous machine about ten percents. This paper using the patent technology— a type of can, adopt magnetic conductive can, to solve the problems as large equivalent air gap, large exciting current, low power factor and low efficiency of traditional canned motor.First of this paper, make a brief introduction to the working principle and structure characteristics of vacuum pump, and review the developing history of canned motor. According to the design characteristics of canned motor, design the electromagnetic parameters for 2.2kW and 2.9kW canned motor. The cans made by Sus304, Sus316 L and Sus430 three kinds of stainless steel materials to do comparative analysis. Then simulate the electromagnetic field of canned motor, and verify the rationality of electromagnetic design and the feasibility of magnetic conductive can by finite element software ansoft.Secondly, using finite element software Ansys Workbench to simulate the temperature field and stress field of the canned motor. Import the motor parts loss as heat load into the model to analyze the temperature distribution regularity of canned motor with three kinds of material can. Then import the calculation results of steady state temperature field into the stress field to analyze the thermal deformation and thermal stress distribution characteristics. Through the analysis of temperature field and stress field simulation, concluded that Sus430 canned motor has lowest temperature rise, thermal deformation and thermal stress, which can effectively improve the vacuum pump running stability and reliability.Finally, experiment the 2.2kW and 2.9kW canned motor with can of Sus304, Sus316 L and Sus430 material by no-load test, load test and short circuit test. According to process the experimental data, the canned motor characteristic curve were obtained. Comprehensive index from good to bad order is: Sus430 motor, Sus316 L and Sus304 motor. Comparison of imported motor, Sus430 motor and domestic motor characteristic curve, in this paper, the comprehensive index of Sus430 canned motor is better than imported motor, far better than the existing domestic motor, and the Sus430 canned motor can be used to instead the import motor and domestic motor.