Investigation Of Characteristics Of Fe-N On Al₂O₃ Substrate Prepared By Magnetron Sputtering

With the development of spintronics,the discovery of giant magnetoresistance and tunnel magnetoresistance has made researchers pay more attention to the research of magnetic materials and magnetoelectronic devices.At present,spintronics has conducted a lot of research on the preparation,characterization and device design of new materials,and has made great progress.Fe-N compound material is a kind of typical magnetic material with high saturation magnetization,low coercivity and good corrosion resistance,which makes it have broad application prospects in the field of magnetic storage and magnetoelectronic devices.In this paper,Fe-N thin films were prepared on Al₂O₃ substrate by magnetron sputtering technique,and Fe-N compound samples of different compositions were prepared by changing N₂partial pressure and substrate temperature.It is found that in the case of low temperature or low partial pressure of N₂,the product has only cubic phase?-Fe.With the increase of temperature and N₂ partial pressure,the main products are?"-FeN and?-Fe_2?3N,and Fe:N ratio in?-Fe_2?3N can be effectively regulated.The microstructure of Fe-N film shows that the lattice matching mode of?-Fe_2?3N and Al₂O₃ interface is?-Fe_2?3N?002?//Al₂O₃?006?,and the film has better crystal quality.By studying the composition characteristics of the samples,the chemical environment and binding energy of Fe in Fe-N compound are also determined.By studying the magnetic properties of the samples,it is found that as the partial pressure of N₂ increases,the saturation magnetization of the sample decreases,and the Curie temperature of the sample also decreases,which are related to the weakening of ferromagnetic coupling effect between Fe and Fe by N ions.By studying the electrical properties of the samples,it is found that the number of N components directly affects the electrical transport properties of the sample.The electrical conductivity of ferromagnetic samples increases monotonously with the increase of temperature,while the resistivity of paramagnetic samples decreases monotonously with the increase of temperature.These results provide the theoretical and experimental basis for the design of magneto-electronics devices based on Fe-N compounds.