Design And Output Performance Test Of Liquid Piezoelectric Pump Based On Cantilever Beam Valve

In recent years,the research and application of micro-pumps have become a hot research direction in the field of fluid precision driving.The piezoelectric pump using piezoelectric vibrator as the driving component can realize the one-way transmission of fluid through the bending deformation of the vibrator and the valve.In this paper,a miniature piezoelectric pump with cantilever beam valve is designed and related theoretical research is carried out.The relevant parameters of the piezoelectric vibrator are simulated and tested.The piezoelectric pumps are fabricated and tested for output performance.The piezoelectric pump structure is analyzed and tested to optimize its performance.The specific work contents are as follows:According to the design requirements,the structure of each component of the piezoelectric pump is designed,the minimum center displacement of the vibrator required to meet the flow output requirement is calculated and simulated to verify the correctness of the vibrator selection;Considering the processing technology and the pump chamber compression ratio,the height of the pump chamber and the diameter of the inlet/outlet orifice are analyzed;simulating the modal of the valve film to determine the size of valve.The modal analysis and wet modal analysis of the piezoelectric vibrator are earried out to determine the mode shape and resonance frequency of the piezoelectric vibrator.Impedance analysis of the piezoelectric vibrator is carried out to verify the correctness of the simulation.The experimental platform is built to study the factors affecting the amplitude of the piezoelectric vibrator.The piezoelectric pump prototype is designed,fabricated and assembled,and a large number of experiments are carried out.The influence of the voltage and frequency of the excitation signal on the output performance of the piezoelectric pump is tested and analyzed.The effects of piezoelectric pump chamber height,valve hole diameter and valve hole structure on the output performance of the piezoelectric pump are investigated and analyzed.In this paper,the piezoelectric pump is designed,simulated,processed and assembled according to the preset requirements of the piezoelectric pump?output flow Q₀?1.5 ml/min,pressure P₀?6 kPa,volume V₀??25mm×8mm,mass m₀?2.5g?.The experimental results show that the output performance of the piezoelectric pump meets the preset requirements(Q_max=1.885 ml/min,P_max=6.83 kPa,V=?020mm×5mm,m=1.8g),and the influence of the structural parameters of the piezoelectric pump on the pump performance is explored.