Study On Tunable Antenna Based On MEMS Tunable Capacitor And Inductor

In this paper,a MEMS tunable capacitor with non-planar symmetric double-lever structure on the upper plate is designed,and its detailed structural design.Its detailed structural design,mechanical performance analysis,electrical performance analysis,theoretical derivation calculation,simulation analysis and process design are introduced.A MEMS tunable inductor with a top inductive coil suspension is designed.Its detailed structural design,theoretical calculation analysis and process design are introduced.This paper proposes two novel tunable dual-band antennas with Tunable Inductor and Capacitor?TIC?.The two-stage tunable circuits of the TIC can coordinate with each other,so that the tunable antenna can adjust the impedance matching between the antenna and the feed while changing the resonant frequency of the antenna.It greatly increases the working bandwidth compared to non-tunable antennas.For 5G mobile communication,a novel tunable dual-band Inverted-F antenna?IFA?with TIC is proposed.The tuning ranges of two tunable capacitors?C₁ and C₂?and one tunable inductor?L?are 0.1 pF-1.2 pF,2.2 pF-3.5 pF,and 2.5 nH-4.5 nH,respectively.HFSS simulation result shows that the tunable dual-band IFA-TIC are 2.695 GHz-3.855 GHz and 4.35 GHz-5.227 GHz at|S₁₁|>14 dB.It realizes that a single tunable dual-band IFA-TIC fully covers the medium frequency of 5G mobile communication in China.For 2G/3G/4G mobile communication,a novel tunable dual-band Planar Inverted-F Antenna?PIFA?with TIC is proposed.The tuning ranges of two tunable capacitors?C₁ and C₂?and one tunable inductor?L?are 0.1 pF-2.0 pF,12.0 pF-20.0 pF,and 4.6nH-15.8 nH,respectively.At|S₁₁|>14 dB,the tunable dual-band PIFA-TIC are 700 MHz-970 MHz and 1690 MHz-2710 MHz,respectively.It realizes that a single tunable dual-band PIFA-TIC fully covers the Chinese 2G/3G/4G mobile communication band.The tunable antennas proposed in this paper can provide an effective method for further reducing the necessary number and overall size of antennas,and can play an important role in 5G mobile communications.