Analysis On The Effect Of Statistical Parameters On Regular MEMS Models

Micro electro mechanical system(MEMS)was appeared in the 1960 s,which was a combination of microelectronics and micro-mechanical technique.Currently,statistical analysis(SA)of MEMS devices has already became an important task in MEMS design.As the feature sizes of MEMS devices decrease,the requirements of statistical models of MEMS devices increase at the same pace.Based on the specialized knowledge of MEMS design,designers can build a statistical model for a specific MEMS device.Considering that analyzing the effect of statistical parameters is complicated,MEMS manufacturers pay great attention to SA.In order to obtain a generalized methodology for analyzing the MEMS device,the SA method was used and integrated in a created software named “SAM”.This paper concentrated on the modeling and simulation using some basic distribution functions(such as uniform and Gaussian distribution).These distributions were implemented in both Sugar(based on Matlab)and Smash(based on VHDL-AMS).Although it’s not a complete solution,this approach showed promising results of building the statistical models of MEMS devices.Moreover,an easy-to-use software called “SAM” that was used for statistical analysis of MEMS models was developed in this paper.With the help of Sugar and “SAM”,users can employ an user-friendly interface and achieve the modeling and simulation of MEMS devices fastly.Additionally,“SAM” can easily be extended for any further enhancements.