Structure Design And Performance Analysis On Stacked Type Multi-chamber Parallel Piezoelectric Pump

Piezoelectric pumps have wide application prospects because of their small size,simple structure and easy processing,and output flow can be precisely controlled.Faced with different application fields that have different requirements on the output flow of the pump,piezoelectric pumps with different output capabilities have been continuously researched and developed.In order to meet the different demand of pump flow in different fields,various forms of piezoelectric pump have been developed.In order to increase the output flow rate of the piezoelectric pump,the main way is to increase the number of driving oscillators at present,so there are forms of multi-chamber piezoelectric pump.There are three main structural forms of multi-chamber piezoelectric pump,namely series type,parallel type and mixed type.From the previous research of piezoelectric pump,we know that multi-chamber piezoelectric pump can not only increase the output pressure,but also increase the output flow rate.From the previous research of piezoelectric pump,we know that multi-chamber piezoelectric pump can not only increase the output pressure,but also increase the output flow rate.The multi-chamber parallel pump can mainly increase the output flow rate,and the multi-chamber series pump can mainly increase the output pressure.As the number of oscillators increases,the size of the pump body increases.In order to reduce the volume of pump body to adapt to various applications.In this paper,a multi-chamber parallel valve piezoelectric pump is designed by means of "row type" and "stacked type ".The output performance of the piezoelectric pump not only depends on the performance of the piezoelectric vibrator,the performance of the inlet and outlet globe valves,but also depends on the structure of the cavity and the working mode of multiple piezoelectric vibrators.Using piezoelectric vibrators to drive piezoelectric pumps,a variety of stacked multi-cavity miniature piezoelectric pumps are designed.Based on the research and development of multi-chamber parallel piezoelectric pumps,researches onthe structure design and experiment of stacked multi-chamber parallel piezoelectric pumps were carried out.The main research results are as follows:(1)On the basis of briefly explaining the piezoelectric driving theory,the theoretical mechanical model of the vertical piezoelectric vibrator is built by the analytical method,and the dynamic characteristics of the single-chip piezoelectric vibrator are simulated and analyzed by the finite element analysis method.(2)Briefly explain the type and working principle of passive globe valve.After comparing several passive globe valves,the umbrella-shaped rubber valve was selected for the test based on its processing technology,cut-off capacity and cracking pressure.(3)Combined with the parallel structure of the piezoelectric pump can improve the output flow characteristics,the "row type" and "stacked type" multi-cavity parallel piezoelectric pumps were designed and manufactured respectively.According to the working characteristics of various parallel structures,combined with the test prototype,the test performance and analysis of the performance characteristics of each structure when working.The structure of the piezoelectric pump is optimized.