Research On Dynamic Performance Analysis And Control Of The MEMS Mirror

Micro electro mechanical systems are generally composed of micro-sensors,micro-actuators,signal processors and control circuits.They are integrated,miniaturized and mass-produced.They are gradually replacing traditional sensors and mechanical structures.They are already in aerospace equipment and space.Widely used in satellites,launch vehicles,aircraft,vehicles,consumer electronics and biomedical applications.The paper first introduces the classification and application of MEMS mirrors.Then,it studies the two-axis electrothermal MEMS mirror with folded double S-type ISC Bimorph drive structure,which can realize vertical piston motion and two-dimensional torsion,with large displacement,low driving voltage and easy to manufacture,etc.Secondly,the motion model of the mirror is studied.Through the combination of theory and experiment,the model of the electrothermal MEMS mirror system is established and verified by experiments.Finally,based on the MEMS mirror to explore the miniaturization of the depth camera and the scanning of the light with dark stripes and equal spacing was realized.In the research of the two-axis electrothermal MEMS mirror with folded double S-type ISC Bimorph drive structure,the driving principle of the actuator is first analyzed.Then the two-axis electrothermal MEMS micro-mirror modeling method is discussed.According to the thermodynamics,mechanical vibration,frequency response and optical dynamic scanning pattern analysis of the two-axis electrothermal MEMS mirror,the actuator cross-axis coupling model of the two-axis electrothermal MEMS mirror is established,considering the cross-axis coupling.Finally,The MEMS mirror system model is simulated by Matlab/Simulink,the optical dynamic scanning mode of a single actuator and two actuators of the two-axis electrothermal MEMS mirror is simulated.The simulation results are compared with the actual situation of dynamic scanning of two-axis electrothermal MEMS mirror.The results show that the model effectively simulates the optical dynamic scanning mode of the two-axis electrothermal MEMS mirror.In the research on the control of the MEMS mirror,the analysis of the principle of light on the opposite structure,on the basis of theoretical feasibility,the design of the overall system scheme are first carried out.Then the hardware and software design is completed,including the design of the main control chip module and communication module,embedded software.Using the KEIL4 development environment,the host computer software was written in C#language.Finally,the experimental platform was built,and the feasibility of the pre-scanning stage of the depth camera miniaturization was verified by experiments.