Research On High Dynamic Piezoelectric Power Supply For Inertial Stick-Slip Driving

The inertial stick-slip driving is widely used in the field of cross-scale precise positioning,because of its advantages of fast motion and high positioning accuracy.In the inertial stick-slip driving system,the piezoelectric driving power supply outputs the driving signal and drives the inertial stick-slip platform for fast motion and precise positioning.However,the inertial stick-slip driving more and more needs a piezoelectric driving power supply with high dynamic characteristic and high stability.Based on the analysis of the dynamic characteristic and stability of the piezoelectric driving power supply at home and abroad,it is found that the piezoelectric driving power supply has the problems of slow step response and poor stability when it faces the inertia stick-slip driving.Under such research and application background,aiming at the demand of the dynamic characteristics and stability of the piezoelectric driving power for the inertial stick-slip driving,this paper studies the high dynamic piezoelectric driving power supply.Firstly,the high dynamic power amplification circuit is studied in this paper in order to solve the problem of slow step response.According to the driving characteristics of inertia stick-slip,the power amplification circuit is designed.By deeply analyzing the influence of the charging and discharging circuit of the middle stage amplification circuit on the dynamic performance,the dynamic response optimization method of the power amplification circuit is proposed.The method is to improve the dynamic response performance of power amplification circuit by optimizing the charging and discharging circuit of the power metal oxide semiconductor field effect transistor(MOSFET)and improving its switching speed.Secondly,the stability of the high dynamic power amplification circuit is studied in order to solve the problem of poor stability.Through analyzing the loop response characteristics of power amplification circuit,it is found that the power amplification circuit is is prone to self-excited oscillation,so the stability compensation circuit is designed.The compensation circuit consists of three RC branches,whose function is to compensate the loop response characteristics,to improve the stability of the high dynamic power amplification circuit.Thirdly,the system realization of high dynamic piezoelectric driving power supply for inertia stick-slip driving is studied.Based on the research of dynamic characteristics and stability of power amplification circuit,the high dynamic parameter design and stability parameter design of power amplification circuit are carried out.The schematic diagram and PCB diagram of the driving power system were designed step by step,and the high dynamic piezoelectric driving power supply prototype is made.Finally,the experiment on high dynamic piezoelectric driving power supply for inertia stick-slip driving is studied.The experiment system of driving power supply is set up,and the dynamic response characteristic and stability are tested.In terms of dynamic characteristic,the step response time Tup of the driving power supply is 40?s,which has high dynamic characteristic.In terms of stability,the driving power supply can stably output the driving signal of Vp-p=150V.Its phase margin ?m is up to 80°,and the static ripple voltage Vr is less than 3mV,which has high stability.When driving power supply is used in inertial stick-slip,its motion velocity Vs is improved from 1mm/sto 3.75mm/s,and the displacement error ?X is decreased from 280nm to 20nm.Therefore,the high dynamic piezoelectric power supply studied in this paper can improve the motion speed and positioning accuracy of the inertial stick-slip driving,which has practical significance for promoting the development of the inertial stick-slip driving.