Study On Trans-Scale Precision Motion Platform Based On Inertial Stick-Slip Drive

With the development of Nanotechnology, the fundamental part ―the technology of trans-scale precision motion platform based on inertial stick-slip drive‖ provides basic conditions for Nanotechnology. The study of the precision motion technology is the significant way to improve the feasibility of nanotechnology. In addition, the technology plays a critical role in optical adjustment, medical and biological sciences, ultra-precision machining, the semiconductor industry, precision testing, the operation and assembly of micro mechanical parts, aeronautics and astronautics, etc. According to development at home and abroad, there are a lot of trans-scale precision motion platforms, but the trans-scale precision motion platform based on inertial stick-slip drive has more broaden application because of its advantages, such as nano resolution, millimeter travel, smaller volume, greater driving force, larger holding power. Under such research and background mentioned above, this paper proposes a kind of cross-scale precision motion technology based on PZT— inertial stick-slip driving.The work is sponsored by the Natural Science Foundation of Jiangsu Province ―The research on Nano precision cross-scale motion technology based on stick-slip driving‖(No. BK20140345). Through the comprehensive analysis of the trans-scale precision motion technology and inertial stick-slip driving technology at home and abroad, this paper focuses on four parts: Mechanism research on inertial stick-slip driving, Modeling and simulation research on inertial stick-slip system, Research on the structure of the inertial stick-slip platform and the experiment of inertial stick-slip system.First of all, in the mechanism research on Inertial stick-slip driving, this paper introduces the principle of inertia stick-slip driving, reveals the complexity of the dry friction using the microslip model, divides the process from "stick" to the "slip" into three phases: fully viscous phases, local slip phases, fully slip phases, and it is pointed out that the LuGre model which can be used to describe the static and dynamic characteristics of the dry friction is suitable for dynamic model of inertial stick-slip system. After introducing the LuGre model, the tribological properties of the LuGre model can be reflected by the simulation: pre-sliding phenomenon, Stribeck effect, etc. At last, this paper introduces the method of identification the dynamic and static parameters in LuGre model.Secondly, in the modeling and simulation research on Inertial stick-slip system, the moving process of the inertial stick-slip system is expounded further from the mathematical modeling. The mathematical modeling includes: the modeling of PZT, the modeling of inertial stick-slip system based on LuGre model. This paper uses Matlab to simulate the mathematical model, and it presents the design criterion of the inertial stick slip system. According to the simulation results, it provides theoretical guidance for the study of the structure of the inertial stick-slip system.Thirdly, in the research on the structure of the inertial stick-slip driving platform, it describes the classification of flexure hinges in details, and the straight-beam flexure hinge is selected as the research object at last. The flexure hinge is modeled mechanically. This paper selects the multi-objective optimization of genetic algorithm to optimize the dimension parameter of flexible hinge. According to the design criteria obtained by the simulation results, two precision motion platforms have been designed.At last, in the experiment of Inertial stick-slip system, in order to measure the static and dynamic performance of the system, static and dynamic performance test system has been set up, and the performance test of the prototype is carried out. The effects of some parameters on the motion of the prototype are verified by experiments, such as mass of inertial mass, slider mass, friction, frequency of driving signal, amplitude of driving voltage. What’s more, this paper compares the experimental results with the simulation results, so as to verify the accuracy of the theory.