Research On Mems-Based Triboelectric Nanogenerators And Self-powered Sensors

At present,with the development of electronic technology,a large number of micro low-power electronic devices and wireless sensing technology began to come into our lives.How to continuously supply power for a large number of micro low-power devices has become an urgent issue.In recent years,the triboelectric nanogenerators?TENGs?,which can continuously supply power for low power electronic devices and work as a self-powered sensor at the same time,has been paid more attention from researchers.However,high internal resistance and low output power are the key factors of restricting the further development and application of TENGs.In view of the above problems,this paper mainly carried out the following work:1.Firstly,TENGs with porous structure were prepared by using Na₂CO₃,NaCl and sugar as sacrificial materials.Then,according to the experimental data of three kinds of TENGs,it is concluded that Na₂CO₃/PDMS TENG with porous structure prepared by using Na₂CO₃ as sacrificial material can obtain better output performance.On one hand,when the device acts directly with the human body as a power supply,an open-circuit voltage of 125 V and an output current of 100?A can be obtained.Furthermore,the electrical energy generated by Na₂CO₃/PDMS TENG during operation can lighten 42 LEDs in real time without any energy storage devices.The results show that the micro-low power electronic devices can work normally through the power supplied by the device.On the other hand,when the device is fixed on different parts of the human body,the voltage signal with different amplitude and waveform will be obtained.This suggests that Na₂CO₃/PDMS TENG can also be used as an self-powered motion sensor to monitor human motion.2.In this paper,the ultrathin molybdenum disulfide?MoS₂?was doped into TENG with porous structure to improve its output performance by making full use of the electron trapping ability and conductive property of ultrathin MoS₂.When the external mechanical vibration pressure is 8 N and the frequency is 4 Hz,the open-circuit output voltage of Na₂CO₃/PDMS TENG doped with ultrathin MoS₂ is 110V.The results show that the output performance of TENGs can be improved through the doping ultrathin MoS₂ material.