Optimized Design And Application Of Anti-vibration Base Station For AMOLED Production Line

AMOLED display technology has greatly improved the convenience of mobile terminals with its realistic picture quality,thinner size,and more portable user experience,making it a recognized leader in smart device panels and an important pillar for the development of the terminal device industry.High-precision AMOLED production line equipment and related manufacturing equipment have very strict requirements for micro-vibration isolation,and it is necessary to consider reducing the micro-vibration in the surrounding environment.Therefore,it is very necessary to install the anti-vibration base station of the equipment manufacturing line in the process interval.In this paper,combined with an engineering example of a new exposure machine in the ARRAY workshop of a photoelectric Limited company in Kunshan,this paper uses a combination of theoretical analysis,on-site environmental vibration measurement and finite element software SAP2000 modeling to study the dynamic characteristics of the anti-microvibration abutment to ensure.The anti-microvibration foundation of the exposure machine meets the design requirements of the anti-microvibration,meets the normal operating conditions of the exposure machine equipment,and provides the basis for the structure design of the micro-vibration base and data support for similar projects.The main research content of this paper includes the following aspects:(1)Summarize and classify the anti-microvibration abutment,and show that the energy consumption mode of the abutment plate is through its own block structure symmetry,mass concentration,inland versatility,and the use of other energy enclosures and path barriers.It can achieve the effect of vibration reduction and provide theoretical support for the structure design of the same type of anti-microvibration abutment;(2)The project carried out two vibration tests,the first was the vibration test before equipment placement,and it was measured that the abutment was placed directly.On the floor,the equipment operation requirements can be met.The second test is to measure the vibration level of the measuring point after the equipment is placed.The measured abutment surface has good integrity,meets the normal operating conditions of the equipment,and meets the design requirements;(3)Use finite element SAP2000 analysis software to establish a finite element model.From the modal optimization design of the dynamic parameters of the anti-microvibration abutment in Chapter 4,it can be known that the aspect ratio of the abutment plate,the internal form of the frame,the connection between the column and the abutment plate.The dynamic parameters such as the restraint method and the column section size can improve the vertical vibration characteristics of the anti-microvibration abutment structure and improve the vibration isolation performance of the anti-microvibration abutment within the studied range.(4)It can be seen that these four factors can improve the vertical vibration characteristics of the anti-microvibration base structure and improve the vibration isolation performance of the anti-microvibration base platform.