Research And Application Of Vibration Isolation Design Method For High Performance Air Bearing Platform

With the continuous innovation of science and technology,the optical industry,aerospace,precision processing and other industries have made great progress,and industrial engineering has entered the era of precision and ultra-precision.Precision equipment is extremely sensitive to the vibration of the surrounding environment.The system is complex.Sometimes the small change of the input load will cause a large error in the vibration response.The uncertainty of the input load will be seriously amplified in the calculation result,which will seriously affect the analysis and design.The accuracy.In order to ensure the normal use of precision equipment,it is necessary to control the vibration that affects precision equipment.This paper introduces the vibration isolation principle and design scheme of high performance air floating platform.In view of the problems and shortcomings in the current conventional design flow,an efficient air suspension platform vibration control design scheme is proposed.The vibration of the precision equipment in the Institute of Nanoscience of Chinese Academy of Sciences In the control project,the design scheme is used as a guide to accurately evaluate the ambient vibration level of the precision equipment,obtain the excellent frequency of environmental vibration,and analyze the vibration isolation performance of the air-floating platform using Ansys finite element calculation,combined with the building structure and environmental requirements.The design parameters of the air-floating platform;finally,the non-stop non-destructive construction technology applicable to similar projects is proposed.The research conclusions can provide theoretical basis and technical support for the application of the air-floating platform.