Research On Fabrication Technology And Calibration Algorithm Of 32 × 32 MOEMS Rotary Mirror Array Optical Switch

Optical transport network(OTN)is one of the important development trends of all-optical networks in the future.With the rapid increase of data traffic,it is imperative to complete large-grain services directly in the optical layer.Optical cross-connect(OXC)is one of the fundamental technologies for the development of optical transport network to all-optical networks.Optical switch array is a key component in optical cross-connect(OXC)MOEMS array optical switch.The array optical switch based on MOEMS technology is attracting market attention due to its high integration and high port number achievability.In this thesis,the general optical path design of MOEMS rotary mirror array optical switch is studied.The fabrication process and process of the collimator array are described in detail.The algorithm design and experimental test of the automatic calibration system are completed.The main contribution and innovation of this thesis include the following aspects:The optical path design and system structure of the 32×32 MOEMS rotary mirror array optical switch are described in detail.The fabrication methods of some common optical fiber arrays are summarized and the fabrication process of optical array and collimator array are mainly introduced.And the performance parameters were tested and analyzed.The test of return loss of fiber array and the output light deflection angle,waist distance,spot size and insertion loss of the array were completed.The results are basically consistent with the design expectations.In this thesis,the design scheme of automatic calibration system is proposed,and the mechanism principle,program flow,algorithm characteristics and applicable range of various common optimization algorithms are expounded.Through the test of the calibration search process and the analysis of the advantages and disadvantages of the search algorithm,this thesis proposes a combined search method of fine search based on genetic algorithm and rough search based on hill search algorithm.Then,a series of test experiments such as voltage sensitivity test,power evaluation curve analysis,voltage sampling stability duration test and CHn-n channel rough search voltage range test were performed on the basis of the combined search method.Channel search scheme is proposed in which CHn-n channel patterns are sequentially searched for adjacent CHn-m channel patterns,and each channel pattern is searched sequentially from highly sensitive dimensions to low sensitivity dimensions.Finally,the variation rule of the optimal voltage and the number of channels and rows is summed up in the test of the whole channel search scheme.The experimental results show that the full channel search scheme has high feasibility and search efficiency.