Application Of Aqua Regia Etching Solution In TFT Recycle Technologies

In this paper,the aqua regia etching solution was applied to the abnormal mass of TFT recycle glass process.Using the actual production system as a platform,analyze the relevant effecting factors of aqua regia etching solution in TFT recycle technology,etching effect and etching mechanism.On this basis,a comprehensive analysis was carried out to the feasibility of applying of aqua regia etching solution to TFT recycle technology,and furthermore,provides data and theoretical guidance for aqua regia etching solution to TFT recycle technologyThe main objectives were as follows,the concentration requirements,the temperature requirements,the time requirements and the production yield analysis of the aqua regia etching solution in TFT recycle technology.Through the continuous production practices,the paper was to determine the production yield of the aqua regia etching solution in TFT recycle technology,and assessed their prospects in the actual production process.The results showed that,when the two pickling jar filled with acid,the etching rate of aqua regia etching solution was rapidly increased to 818.1A / min,and could maintain nearly nine days.This showed that,under stable acidic conditions,the etching rate of aqua regia etching solution was quite stable.With regard to the stability and cost of the production process,the optimum temperature of aqua regia etching solution in the etching process was 45?,the operating time is 438 s,and the overall production yield can be maintained at 96%.The aqua regia etching solution produced by Jiangyin Yun Ma company and Xingu micro-company got a better etching effect.All the surface of 30 samples was very uniform,no residual film exists,that could achieve the required standards.In the small amount of test conditions,the optimum operating conditions was applied for the aqua regia etching solution produced by the two companies.Whatever the form of residual,the result of two aqua regia etchant was no difference,and maintain a high degree of consistency.All samples showed no ITO surface residues,and both aqua regia etching solution can achieve this result.The Best conditions were applicable to all aqua regia etching solution,and both of which could achieve good production results.The results of the research were expected to reduce the consumption of resources and improve the environmental economics in the production process of TFT-LCD product.These could promote the innovation of TFT-LCD production process effectively,and reduce the production cost of TFT-LCD products significantly.Meanwhile,in the international and domestic market,these could improve the comprehensive competitiveness of China's TFT-LCD products.