Vibration Suppression And Controller Design Of Servo Direct Drive Shaft In Wafer Level Flip-chip Equipment

With the continuous improvement of the performance of microelectronics manufacturing and packaging equipment,the high-speed and high-acceleration motion characteristics and precision positioning performance of its key moving parts,the motion platform,have become one of the key factors affecting the equipment performance.The contradiction between high speed and high acceleration and high precision and rapid positioning is a key problem in the current research and development of precision motion platform.In-depth study and exploration of effective solutions are of great significance to the development of China's advanced packaging equipment,independent research and development and industrialization.The core of the motion platform in wafer-level flip-chip equipment is the servo-driven shaft.When debugging the servo-drive shaft in wafer-level flip-chip equipment,the following two problems are found: First,due to the insufficient rigidity of the servo system,if the rapid response performance of the servo direct drive shaft is too high,the system will resonate,and even if it is serious,the mechanical structure will be destroyed.Second,due to the existence of software delay and hardware delay.The motor also has a certain degree of lag during the movement,which seriously affects the rapid response of the motion platform.Due to the above two problems,the high acceleration and high speed of the servo direct drive shaft and the precise positioning are difficult to be guaranteed,thereby reducing the working efficiency of the whole machine.This paper mainly studies how to achieve precise positioning of servo direct drive shaft under high speed and high acceleration motion.At the same time,the research on vibration suppression method and fast positioning method is carried out.A controller was designed to propose a method of suppressing mechanical vibration of the system and improving the fast response performance of the system by adding a notch filter and a feedforward controller to the servo controller.Through software simulation and experimental research,it is verified that the controller designed in this paper can effectively suppress the mechanical resonance of the servo direct drive shaft and the fast response performance of the lift shaft,so that the positioning accuracy of the servo direct drive shaft in the wafer level flip-chip equipment reaches micron levels and positioning times can also be greatly reduced to the millisecond level.Based on the above analysis,the research work of this paper is as follows:1.Combining the high standards of precision and efficiency of advanced electronic manufacturing equipment,we investigate the research on the control of high-speed and high-acceleration motion platforms at domestic and foreign.Inductively summarize and summarize the research status of the vibration suppression method and precise positioning method of the motion platform,and determine the research ideas and main research contents of this paper;2.Construct a motion platform,construct a theoretical model of the controlled system and the motor,and prove the stability of the open-loop system according to the theoretical model of the system.Then,the integral split PID controller is designed.Under the condition that the motor motion platform can be accurately positioned,in order to improve its dynamic response speed,the feedforward controller is added to the control system to ensure the working performance of the motor motion platform and improve the accuracy of motor motion platform positioning;3.Obtain the response data of the system time domain by sine sweeping the system speed loop and position loop,and then use MATLAB to transform the time domain signal into the frequency domain signal of the system using MATLAB to obtain the resonant frequency of the servo system,using Butterworth filterin g.The design method of the device is to design an IIR digital filter to suppress the resonance problem existing in the servo system;4.The designed integral split PID controller and notch filter are simulated by MATLAB respectively.The MATLAB simulation is used to check the effect of the designed controller.After confirming the rationality of the design,the designed controller is applied to the crystal.In the servo control system of the round-level flip-chip equipment,the performance of the servo direct drive shaft in the time domain and the frequency domain is tested.As the X-axis of the dispensing module studied in this paper,after filtering and introducing feedforward control,the steady-state error is less than 8um and the setting time is less t han 15 ms under the motion conditions of 900mm/s and 6g acceleration.It is fully capable of meeting the application requirements of the device.