Study On The Control Technology Of Motion Precision Of Double-axis Grinding Wheel Dicing Saw

At present,IC in semiconductor industry has been developing towards high density,which required the machining precision be higher and higher.The cutting process of the integrated circuit separates circuit units by cutting the cutting channel with a width of only a few tens of microns on the circuit board,so the thickness o f the grinding wheel used in grinding wheel dicing saw is only tens of microns less than the width of the cutting channel.Comprehensively considering the influence of other parameters in cutting process,the machinning precision of grinding wheel dicing saw must reach micron level.In order to meet the machinning precision of grinding wheel dicing saw,the following research have been done on the motion precision control of grinding wheel dicing saw in this paper:(1)The design of the dicing machine control system.According to the functional requirements and technical indicators of the dicing machine,the control system principle design,the main hardware selection of the control system,the driver power supply circuit design and the alarm system design were carried out.(2)Servo system performance debugging.The control circuit of servo drive was designed and its parameters were configured.The effect of PID control and PID + feedforward 2-DOF control on servo motor positioning precision were studied.The position control modes of servo system were explored and the servo system parameters were debugged.After testing,the servo system performance fully met the design requirements of servo system.(3)PMAC motion control design.The PMAC motion controller was configured,including hardware configuration and software configuration,which provided a platform for subsequent programming.This article mainly designed the zero-return program to guarantee the precision of zero-return,and the contact height measurement program and non-contact height measurement program to ensure the precision of height measurement.The precision of zero return,contact measurement and non-contact measurement all met the design precision.(4)The positioning error compensation of PMAC motion controller.This article introduced the measurement principle,operating methods and measurement error of laser interferometer when measuring the positioning error.The standard pitch error compensation function of PMAC motion controller was used to compensate the positioning error of linear axes,the calibration pitch error compensation function was used to compensate the positioning error of Y1 and Y2 axes,whose stroke is very long and positioning precision is very high.The machining precision of dicing saw was tested by wafer cutting experiments.They met the required machining precision of dicing saw.