The High Precision Motion Positioning And Its Error Compensation Of Dicing Machine

With the progress of science and technology, semiconductor chips have become the basisof the electronic information industry. An important semiconductor chip production process iscompleted by the dicing machine, the capacity of which decides the quality and yield of thechip production. In order to save raw materials and improve chip yield，the silicon wafersbecome thinner and incision becomes smaller in width, In order to meet the growing need forhigh process requirements, the dicing machine need more stable performance. Currently dicingmachine manufacturers and skill levels are less advanced and have a certain gap, so improvingthe performance of dicing machine plays an important role for the domestic electronicsindustry.In order to solving the existing problems, the paper includes precision dynamic andpositioning error compensation. High precision positioning system of the dicing machinechooses servo motor as driving device of the dynamic system, uses the grating ruler to measurethe dynamic displacement data, and selects the fuzzy PID control algorithm, to achieve theclosed-loop dynamic of the control system. In order to make response speed of the movementsystem faster and the overshoot smaller, the device must be carried out by adjusting the fuzzyPID parameter according to the specific circumstances, and finally get the optimal parametervalues. In this paper, the MATLAB simulation experiments are carried out to verify the effectof the fuzzy PID parameter optimization.In order to further improve the positioning accuracy of dynamic, this paper puts forwardtwo kinds of error compensation method: template compensation and calibration compensation.In the template compensation, the positioning error of different products are scanned, then thecorresponding errors are recorded, so as to compensate the dynamic control parameter emergedwhile the actual production. This method does not depend on the dynamic positioning accuracyof the dicing machine, and it suits the various chips whose sizes are not standard. Thecalibration compensation uses the laser interferometer to identify the closed-loop controlerror of the servo motor, and then establishes the error model using the mathematical method,and after that the control parameters are corrected according to the error model. Thecalibration compensation is suitable for the situation in which chip sizes is standard.