Design And Manufacture Of Piezoelectric Inkjet Printing Head

Piezoelectric inkjet printer head is an important part of piezoelectric inkjet printer.The quality of piezoelectric inkjet printer head directly affects the printing performance of piezoelectric inkjet printer.In this paper,the piezoelectric inkjet printing nozzle is deeply studied from the aspects of material selection,theoretical analysis and design,process flow and vibration test.The piezoelectric inkjet printing nozzle with independent intellectual property rights is designed and manufactured,which promotes the exploration process in the field of piezoelectric inkjet printing.In this paper,a piezoelectric inkjet printing nozzle with independent intellectual property rights is designed and manufactured based on this principle,which promotes the exploration process in the field of piezoelectric inkjet printing.The main contents of this paper are as follows:?1?The design requirements of each component of piezoelectric inkjet printing head are discussed in this paper.The effects of material selection and manufacturing process on the piezoelectric inkjet process are analyzed in detail.It is determined that the substrate is Si,the vibrating plate is SiO₂,the piezoelectric element is lead zirconate titanate?PZT?film,the upper and lower electrodes are metal Pt,the protective layer is Parylene,and the chamber is SU-8.Printing nozzle,and the use of fling glue,exposure,sputtering,dry engraving and other MEMS technology to piezoelectric inkjet printing head manufacturing process.?2?A series of theoretical analysis of piezoelectric inkjet printing nozzles are carried out according to the determined material selection and process technology.The piezoelectric inkjet process is analyzed step by step using the theory of equivalent force,Poiseuille's law and sheet method.The relationship between the size and properties of the vibration plate and the amplitude of the vibration plate is deduced,and the amplitude and chamber of the vibration plate are obtained by sheet method.The volume change is proportional to the volume change.Then the fluid in the chamber is analyzed.The relationship between the amplitude of the vibration plate and the nozzle pressure and the jet speed of ink droplets is obtained.Finally,the optional frequency range of the piezoelectric inkjet printer is obtained through the Helmholtz theory.?3?according to the above theoretical analysis,combined with the technological characteristics of MEMS technology,the compatibility of various parts of the printhead and the preparation process,the paper determines the preparation process of the piezoelectric inkjet printhead:the SiO₂ layer is obtained by dry oxygen process,the upper and lower electrodes are obtained by sputtering and corrosion process,the PZT piezoelectric film is obtained by sol-gel method,the Parylene protection layer and the dry wet etching are obtained by the process of gelling and exposure.The chambers and nozzles were obtained by the process of releasing vibration plate and glue-flipping bonding,and the possible problems in the process were solved and optimized.?4?Aiming at the performance test of the piezoelectric ink-jet printhead,in order to detect the movement of the high-speed ink drop,this paper develops a software of the visual inspection system of the ink drop based on the principle of high-speed imaging.In order to achieve the purpose of higher ink extrusion pressure and greater deflection of the vibrating plate,guided by the theory,this paper further discusses and designs a new vibrating plate structure of Cu/SiO₂ structure The results show that the new vibration plate structure has higher amplitude,which not only verifies the feasibility of the theory,but also plays an active role in improving the ink extrusion pressure.