Research On Surface Shape Restoration Of Large-aperture Standard Mirror With Large Inclination Angle And Dynamic Range

Large-aperture standard mirror is an important measuring instrument in the surface-profile of optical components as well as a benchmark for the adjustment of large-aperture optical system precisely.With the development of application,most optical systems need large-aperture standard mirror system which works under different conditions.If the traditional passive support is still used,the large-aperture standard mirror will increase the surface-profile error due to the different forces from the working condition changes.Therefore,this paper studies the correction of the surface-profile error caused by different working conditons of large-aperture standard mirror which using the active-passive compound support.The main works are as follows:1.In view of the active correction for surface-profile error caused by small angle of working condition change of 1.2m standard spherical mirror,active-passive compound support system by steel strip support combined 18 axial actuators for active correction is designed.Solidworks modeling and workbench simulation analysis were carried out to correct the surface-profile under different small angle conditons.Make the surface-profile error back to standard working conditons(in vertical).2.In order to verify the reliability of the active-passive compound support for the correction of large-aperture standard mirror surface-profile error,an experimental system for the active-passive compound support of standard spherical mirror is designed.By comparing the surface-profile under different states,the accuracy surface-profile affected with working state change is obtained.The experimental results are in agreement with the simulation results.3.In view of the active correction for surface-profile error caused by large angle of working condition change of 2m standard flat mirror,active-passive compound support system by 24 points combined axial 33 actuators passive composite support scheme for active correction is designed.Optimize the parameters of support structure by using workbenchsimulation optimization module.It concludes that the surface-profile error back to ?/ 50 by active correction in various working condition.The influence of output force error and position error applied by 1-33 actuators randomly on the surface-profile correction is small,which indicates that the active-passive compound support system has high redundancy and robustness.