| An ultrasonic spray pyrolysis apparatus was built for thin film fabrication. Using the instrument, thin films of strontium-doped lanthanum manganites (La(1-x)SrxMnO3, LSM) and 10% copper-doped bismuth vanadate (Bi2V0.9Cu0.1O 5.35, BiCuVOx.10), whose composite material would be an mixed ionic and electronic conductor, were successfully fabricated on glass slide, stainless steel, and silicon substrates. The prepared films were analyzed by several analytical techniques such as X-ray photoelectron spectroscopy, Raman spectroscopy, interference microscopy, and X-ray diffraction. In X-ray photoelectron spectroscopy results, it was found that all of the target elements were successfully delivered to the substrates. Also, it was found that the remaining nitrate groups were removed by annealing process. In Raman spectrum, it was found that LSM and BiCuVOx crystals were prepared by the pyrolysis. The spectra also showed the structural changes between unannealed films and annealed films. The crystallite sizes of LSM and BiCuVOx films were determined from X-ray diffraction results. |
