| A novel discretized hyperbolic paraboloid geometry ultrasonic sensor microarray of capacitive type sensors has been developed to intrinsically provide a broadband constant beamwidth beamforming capability without any microelectronic signal processing. A mathematical model has been developed and verified to characterize the array response. A design methodology has been presented that enables the determination of array dimensions, sensor type, device modeling and behavioral analysis in a straight-forward manner. The developed theory has been used to design two ultrasonic sensor microarrays: one in the 2.3 MHz - 5.2MHz frequency regime and another in the 113 kHz-167 kHz frequency regime. Individual capacitive type sensor elements have been designed using a cross-verification method that involves lumped element modeling, 3-D electromechanical finite element analysis (FEA) modeling, and microfabrication simulation. The sensor microarray has the potential to be used in real-time automotive collision avoidance applications, medical diagnostic and therapeutic applications, as well as industrial sensing. |
