| Detailed processing techniques and fabrication concerns of RF MEMS switches are investigated in order to improve the switching performance. In addition, details regarding the design of RF MEMS switches for improved yield and reliability are also addressed.; In this thesis, we concentrate on designing an RF MEMS switch for high-frequency applications with a low spring constant, a low actuation voltage, high isolation, and low insertion loss. An RF MEMS switch with an actuation voltage of 85 volts is obtained and further details of how to obtain low actuation voltage and spring constant are proposed. (Abstract shortened by UMI.)... |
