Exploratory synthesis of copper alkoxides as potential precursors for chemical vapor deposition of copper

Volatile copper compounds are needed by the electronics industry for applying thin films of copper during integrated circuit fabrication. Copper alkoxides comprise a class of compounds that offer promise for this purpose. This research investigated possible synthesis pathways to candidate compounds.; Syntheses of aminoalkoxocopper(II) compounds by metathesis in water and under an inert atmosphere were investigated. 2-Aminoalkoxocopper(II) can be made in both environments. N-Alkylamino substituted copper(II) aminoethanolates were synthesized only under an inert atmosphere. 2- N,N-Dimethylaminoethoxocopper(II), 2-N,N-diethylaminoethoxocopper(II), and 2-N-ethylaminoethoxocopper(II) were synthesized. This synthesis method is suggested as a general method for preparation of aminoalkoxocopper(II) compounds. The volatility of 2-N,N-dialkylaminoethoxocopper(II) compounds suggests that they may be appropriate for further development as solid chemical vapor deposition precursors for copper and copper oxides. Their volatility might be controllable by variation of their alkyl substituents.; Attempted formation of oxidatively-stable aminoalkoxocopper(I) compounds, in air, by replacement of nitrato and chlorido groups from triphenylphosphine-stablized copper(I) compounds was unsuccessful. The observed reactions suggest successful syntheses might be conducted under an inert atmosphere.; The synthesis of volatile alkoxocopper(I) compounds was attempted by using a stabilizing ligand to interrupt their polymeric structures. Derivatives of methoxocopper(I) and ethoxocopper(I) compounds using triphenylphosphine were attempted. Methods of separation and isolation of the products were studied. Chloride contamination in reactants and production of copper(I) oxide interfered with success in these syntheses.; Nitratobis(triphenylphosphine)copper(I) was used as a novel starting material for syntheses of triphenylphosphine-stabilized tert-butoxocopper(I) compounds and proved to be a valuable reactant that is easily handled. The triphenylphosphine to copper ratio of the complexes formed varied depending on the solvent used.; Except for 2-aminoalkoxocopper(II), the alkoxo compounds synthesized were found to be oxidatively unstable. Removal of all traces of solvent was difficult in all cases. Purification of triphenylphosphine-stabilized species was also complicated by partial loss of triphenylphosphine ligands. However, some products appear to be stable in solution over extended periods. This fact suggests they may be useful for delivery of copper in aerosol form.