Study On Optimization Of The Evaporation Process Of Cathode-spots-controlled Arc Source Based On Reducing Macroparticles

Vacuum cathode arc ion plating technology(AIP)is an important technology,which is widely applicated in films deposition.In the current industrial production,there is not a method to solve the macroparticles(MPs)contamination very well,all the method have their own shortcoming or there are a lot of limits in their utilization in the industry.In this paper,we systematically study the ? 100mm planar target small arc source which is commonly used in industrial production,and an arc source on which cathode spots can be controlled contraction was produced.Focus on this arc source,the temperature distribution on cathode surface at different working parameters was researched.At last,TiN films were deposited by this arc source,and the surface topography of the films were tested and the situation of MPs distribution was counted.About the structure of the arc source,the magnetic field strength of the magnets and distance between magnets and cathode surface impaction on the cathode spots motion was studied.According to the magnetic field strength of magnets impact on cathode surface and the maximum power of electromagnetic coil controller,an electromagnetic coil was designed and produced.The cathode spots trajectory can be controlled contraction by adjusting the current in electromagnetic coil and the distance to the cathode surface.The pulsed current range was input the electromagnetic coil controller as an important parameter.About the capacity of this arc source,the cathode spots motion velocity,the hysteresis effect between the actual contraction frequency of the cathode spots trajectory and the output frequency of the controller was quantitative analyzed.The arc current and cathode spots trajectory contraction frequency impaction on temperature distribution on cathode surface was studied,and the mechanism of impaction on temperature distribution was worked out.About the technology of films deposition,TiN films were chose for its wide utilization,the surface topography was tested by scanning electron microscope(SEM),the MPs/films area ratio and the largest MPs diameter decreasing obviously with the increase of the scanning frequency.At 30Hz scanning frequency,the MPs/films area ratio decrease to 0.1%,largest MPs diameter decrease to 0.3 ?m,the total quality of the films improve obviously.The deposition rate increase between 1?5Hz,decrease between 5?10Hz,and keep steady between 10?3 0Hz.