The Research On TiN And Ti(Ru)N Coatings Deposited By Multi-arc Ion Plating And Performance

In view of the application requirements of the decorative industry for the hardness and wear resistance of decorative coatings,TiN and Ti(Ru)N(3wt%Ru,l0wt%Ru)were successfully prepared on the Ti6A14V substrate by multi-arc ion plating.Both coatings have a golden sheen in appearance.In this paper,TiN and Ti(Ru)N coatings were prepared mainly by selecting different nitrogen flow rates and different Ru element contents.The purpose of the experiment is to obtain a decorative coating with better mechanical properties and tribological properties while maintaining the golden luster of the TiN coating to meet the development needs of the decorative industry.The main findings of this paper are as follows:In this paper,TiN and Ti(Ru)N(3wt%Ru)coatings were prepared by changing the nitrogen flow rate under four different nitrogen pressures of 1.0Pa,1.5Pa,2.0Pa and 2.5Pa,respectively.The results show that:The phase of the two coatings is TiN phase,and the adhesion of the coating to the matrix is good;A part of the Ru-rich precipitate is found in the cross-section of the Ti(Ru)N(3wt%Ru)coating;The addition of Ru element refines the grain size.The overall grain size of TiN coating is 160?300nm,and the overall grain size of Ti(Ru)N(3wt%Ru)coating is 40?100nm;The addition of Ru element increases the hardness,H/E value and H3/E*2 value of the TiN coating.The related hardening mechanism of Ti(Ru)N coating is fine grain strengthening and solid solution strengthening;The addition of Ru element reduces the friction coefficient of the coating and improves the wear resistance of the coating.Through the comprehensive analysis of hardness,elastic modulus and friction and wear,the results show that the Ti(Ru)N(3wt%Ru)coating has the best performance at a nitrogen flow rate of 1.5 Pa.In order to further study the effect of Ru element on TiN coating,a Ti(Ru)N coating was prepared by increasing the Ru content to 10wt%at a nitrogen flow rate of 1.5Pa.A comparative study of coatings with different Ru contents shows that:The amount of Ru-rich precipitate in the cross section of the Ti(Ru)N(10wt%Ru)coating is increased compared to the Ti(Ru)N(3 wt%Ru)coating;The grain size of the Ti(Ru)N(10wt%Ru)coating is about 60?80nm,and the grain size of the Ti(Ru)N(3wt%Ru)coating is about 50?80nm,so for(3 wt%Ru)and(10wt%Ru)two different Ru contents,the results of refining the grains are not much different;Compared to the Ti(Ru)N coating of 3wt%Ru,the hardness of the Ti(Ru)N coating of l0wt%Ru decreased and the friction coefficient increased.Through a comprehensive analysis of hardness,modulus of elasticity and frictional wear,the results show that the performance of the coating of 3wt%Ru is better than that of 10wt%Ru.Finally,combined with the results of SEM,XRD,XPS and TEM,the Ru element is mainly present in the Ti(Ru)N coating in the form of a Ru-rich precipitate and a solid solution,and a small amount is a form in which is mixed by Ru-containing amorphous part and crystalline TiN phases.