Investigation On Influence Factors And Distribution Law Of Hardness Of TiAlZrN Film System

In this study,titanium,aluminum,zirconium and nitride(TiAlZrN)films with different metal component contents were prepared by multi-arc ion plating.Al Ti target,Zr target,Ti Zr target,Ti Al Zr target were used for the combination.A reasonable process designed.The process parameters including bias pressure,bombardment time,deposition time,gas inflow,deposition temperature were kept consistent in all the depositions.Based on the design of the composition of TiAlZrN films,different target materials were selected and the target current of cathode arc source was regulated to prepare TiAlZrN films with different metal component contents.The thickness of the obtained TiAlZrN films was basically kept the same,and the variation range was 0.8?m?1.2?m.The scanning electron microscopy(SEM)with energy spectrum analysis was adopted to test the composition and morphology of the TiAlZrN films.the X-ray diffraction was used to analyze the phase structure of the TiAlZrN films.The microhardness meter HXD-1000 TM was used for the test of the film hardness.The automatic film adhesion scratch instrument of WS-2005 type was selected to test the adhesion strength of the films.The component content,surface morphology,phase structure,hardness and film/substrate adhesion of each TiAlZrN film were analyzed and discussed.The influences of the composition change on the surface morphology and phase structure of the film layers were investigated.And the hardness change rule of TiAlZrN film layers in different composition intervals was analyzed.The results show that the hardness values of the film layers change regularly with the content of the film composition.When the content ratio of Al:Ti:Zr is closer to 1:1:1,the TiAlZrN film is more likely to appear a larger hardness value.