(TiAlZrNb) N Multi-componient Hard Reaction Films Deposition Process And Performance Of The Research

Based on TiAlZrN hard reaction film，the Nb element is added. By changing thedeposition process parameters and nitrogen partial pressure, the function of (TiAlZrNb)N hard membrane adding Nb element is obtained.The technology of the multi arc ion plating is adopted in the test, using Ti-18Al-11Zr(at%) alloy target and Ti-25Nb (at%) alloy target. The gradient membrane of twodifferent (TiAlZrNb) N hard reaction film composition content is prepared, by changingthe parameters of the two alloy targets current, negative bias pressure and nitrogen partialpressure on the high speed steel (W18Cr4V) substrate.The two kinds of membrane layers are tested respectively. The morphology andcomposition of the surface and the cross section are, using scanning electron microscopy(SEM) detection. The membrane layer film structure is characterized using the X-raydiffraction (XRD). The film hardness is measured using the micro-hardness meter. Themembrane-based adhesion is detected through the membrane layer adhesion scratchinstrument; The thermal shock resistance of membrane layer is detected at700℃, using theSG2-5-12muffle furnace. Researching two components of different layers in the same load,frequency, friction and wear properties at room temperature, the wearing film surfacemorphology are observed with optical microscopy.Study showed that the two different kinds of membrane surfaces morphology are uniformand dense. The number of membrane surfaces droplets decreases significantly. The dropletsize is smaller, compared with the other nitrides hard membrane. The content of Nincreases from the substrate to the membrane layer gradually. The preparation ofmulti-component membrane is proved to be the N reaction membrane gradient in thisprocess. Membrane layer fracture morphology is uniform columnar crystal. The two kindsof membrane layer thickness are in1.4~1.8microns and between1.1~1.5micronsrespectively. The film thickness decreases slightly with the increasing of the bias. The analysis of XRD shows that Two kinds of membrane layer is the face-centered cubicstructure of B1-NaCl type and preferred orientation is (111) surface.Through finding the best process parameters, When the bias pressure is150V, thehighest hardness of the two kinds of film can reach3200HV and3400HV respectively.Two kinds of membrane matrix adhesion is over200N. The thermal shock resistance ofmembrane layer shows that the shock effect containing Al and Nb elements are better inthe two gradient membrane of the different composition. Two kinds of membrane layerfailure is the result of the membrane surface tiny crack, the extension and wideningeventually.Friction and wear performance test analysis shows that the friction ratio is theminimum. And the friction curve gradually tends to be stable, when the bias pressure is150V. In the same bias pressure, the friction ratio of membrane layer is increasing, with theincrease of the friction radius of gyration. And the membrane layer of wear is alsoincreases with the increase of the friction radius.The comparison of two different components of the film (TiAlZrNb) N gradient layershows that (TiAlZrNb) N gradient coatings will be high hardness, high thermal shockresistance and abrasion resistance with the increase of Nb content. Overall, the more Nbcontent increases, the greater the (TiAlZrNb) N gradient improve the mechanicalproperties of the film. But the organization and structure of (TiAlZrNb)N gradient layerdoes not change with the addition of Nb.