Flexible Transparent Conductive Material Based On Nanoimprint Lithography And Extraordinary Optical Transmission

With the rapid development of technology,electronic devices are gradually mov-ing forward from the hard substrate to the flexible platform,and many of them are facing huge challenges.Indium tin oxide(ITO),a widely used transparent conductive material in traditional devices,is difficult to adapt to the needs of flexible devices be-cause of its brittleness and high resistance.Therefore,finding an alternative material for ITO with excellent performance and a reliable fabrication process has become an urgent task of current research.In previous researches,a number of potential ITO sub-stitutes have emerged,such as graphene,carbon nanotubes,metal particles,and metal nanowires.These materials all have some kind of flexibility and have been proven to have transparent and conductive functions.However,these materials still have to face great dilemmas in actual application.These materials all have problems such as high processing difficulty,unsatisfactory performance,and high cost.As a result,this research creatively proposed a double-sided metal transfer process on a flexible substrate based on the traditional nanoimprint system.The highlight of this process is that it can process double-layer patterns at the same time,which greatly improves the efficiency.This process is well compatible with flexible substrates,and is expected to be upgraded to a new type of plate-to-roll-to-plate nanoimprint system in subsequent research to meet the needs of large-scale production.Using this process,this research designed and manufactured a flexible transparent conductive material based on a metal mesh.The material has excellent performance,with a transmittance of up to 94%in the visible light range,and the transmittance is almost consistent across the entire spectrum.It has good electrical conductivity,and its surface resistivity in the smallest direction can be as low as 0.680?/sq.Using this material,this research achieved a capacitive flexible touch sensor and a flexible touch sensor array and verified its touch detection performance.In addition,this research used the self-assembly method of polystyrene nanospheres to realize the manufacture and characterization of flexible ertraordinary optical transmission(EOT)films.This research proposed and verified a scheme to en-hance the transmission effect of the EOT film by adding an additional etching step,and tested its transmittance and surface resistivity.This research attempted to characterize the transmission behavior of the flexible EOT film in the bent state for the first time,which helps to understand the behavior of surface plasmons on flexible substrates.