Effects Of Y,Sn,In On The Structure And Property Of Silver-Based Alloy For Producing Vacuum Sputtering Trget

Silver-based alloy target is one of the common consumables of vacuum coating target,and its large dosage and quality have a si gnificant impact on the final film properties.The research on target preparation technology in China started late and started low,which is still far from developed countries.In this paper,the target material of silver-based alloy blank is taken as the research object,and the effect of the addition of alloy elements such as Y,Sn,In and the rate of permanent magnet stirring on the microstructure and properties of silver-based alloy during casting is studied.In this experiment,a self-designed modified electromagnetic induction melting furnace was used.In the process of preparing silver-based alloy,different elements including Y,Sn and In were added to the Ag-Cu alloy sample,while permanent magnet stirring,X-ray diffraction(XRD),scanning electron microscope(SEM-EDS)and microhardness tester were used to test and analyze the solidification structure,phase composition,corrosion resistance,solute element distribution and microhardness of the sample,and the following research results were obtained:1.Permanent magnetic stirring can effectively refine the grain size of silver-based alloy target blank,increase the density of alloy ingots,reduce shrinkage and porosity,improve the hardness of ingots,and reduce the resistivity of ingots.And with the increase of permanent magnet stirring rate,the effect of grain refinement of alloy structure gradually increases.Considering various factors comprehensively,the permanent magnet stirring rate of 600 r/min is the best stirring rate.2.Adding 0.2%Y to the silver-based alloy can obviously improve the sulfide corrosion resistance of the alloy ingot.However,when the content of Y reaches 0.5%,the sulfidation resistance of the ingot will obviously decrease due to the formation of the net-like second phase.3.After annealing the silver-based alloy with 0.2%Y content,there will be a slight retrogression twin structure,which promotes the refinement of grain structure,but at the same time the hardness and resistivity of the alloy will increase.4.Adding more than 1.5%Sn can obviously improve the hardness of silver-based alloy,but at the same time,it can also improve the resistivity of the alloy.The addition of Sn does not significantly improve the sulfidation resistance of as-cast silver-based alloys.On the contrary,when Sn content is greater than 1.5%,the sulfide corrosion resistance of alloy ingots decreases.The addition of Sn will obviously increase the resistivity of silver-based alloy ingots.5.Adding 1.0%in alone will decrease the hardness value of Ag-Cu-Y alloy,while when in content is 0.75%and Sn content is 0.25%,the hardness value of the alloy will obviously increase.When the Sn and In contents are both 0.5%,the two show a more obvious synergistic effect on the sulfidation resistance of alloy ingots.The effect of Sn on the resistivity of silver-based alloys is significantly greater than In.6.Short-term annealing at 650? for silver base with Sn and In contents of 0.5%is conducive to improving the microstructure of the alloy,while long-term annealing at 700?is not conducive to refining the grain structure.The annealing process of 700-2 h is selected.