Production And Research Of The High Quality Gold-based Alloy Sputtering Target

With the rapid development of modern the jewelry industry and microelectronics industry, the excellent properties of the gold alloy was gradually aroused people's attention, the gold alloy target material is the basic material in the process of vacuum magnetron sputtering plating, not only there is a large amount of consumption, but also the quality of target plays an important role on the performance of the metal film.For the reasons of late starting time and a low starting level on this researching field, there is still a huge gap between China and abroad, especially on some key technical aspects. This paper took the high value-added gold alloy target as researching subject, to investigate the effects of different electromagnetic stirring intensity,permanent magnet stirring speed,different alloy element contents of Al and In on the microstructure and performance of this new gold-based alloy, In the meantime, the action mechanism of both the electromagnetic stirring and permanent magnet stirring on the organization performance of gold alloy were also discussed.This experiment adopts a self-developed device to prepare specimen of gold alloy with different Al and In that casted under the permanent magnetic stirring and electromagnetic stirring,moreover,the solidified structure,the phase composition,corrosion resistance, distribu-tion of solute elements, microhardness and chromaticity of specimen are also tested and analyzed.The experimental results show as follows:1. Adding Al element can improve the hardness of gold alloy,strengthen the alloy wear resistance and prolong the service life of magnetron sputtering film. Adding Al can change the color of the gold alloy and make the chroma from yellow to purple;2. Adding In element can change the chromaticity of the alloy and made its chroma from yellow to blue,with the increase of In content,the corrosion resistance of gold alloy has significantly increased,in the meantime,the hardness, wear resistance,organization performanc-e,the quality of the target material have also been greatly improved;3. Compared with direct solidification,applying different intensity of electromagnetic stirring can effectively refine the gold alloy dendritic structure,reducing the microsegregation of microstructure,what's more, grain refinement can improve the mechanical properties of gold alloy,lay a good foundation for subsequent processing,and extend the service life of the magnetron sputtering film;4. Compared with direct solidification,permanent magnetic stirring can significantly refine grains and reduce microsegregation of gold alloy,with the increase of rotational speed of permanent magnetic stirrer,the dendrite was refined effectively,at the same time, the hardness and corrosion resistance are also improved.