Design And Research Of The Doubol Mode Flexible Sensor Array Based On The Triboelsctronic Nanogenerator

Flexible pressure and temperature sensor arrays can detect the size and distribution of space pressure and temperature,and have been widely used in artificial intelligence,health care and other fields.Most multifunctional sensors should work normally when connected to external power supply.The environmental pollution caused by battery waste and leakage should not be underestimated.With the rise of triboelectric nanogenerator(TENG)and self-drive technology,an effective solution to the problem of power supply has been brought.In this research,a self-driven flexible pressure and temperature sensing array is designed by combining the triboelectric effect and pyroelectric effect.The main contents are as follows:(1)Firstly,a pressure sensing unit(1×1 cm~2)was designed.Its working principle was based on the triboelectric effect and electrostatic coupling effect of TENG,in which organic silicone rubber(Ecoflex)and Ag were used as the triboelectric layers of TENG.The influence of different surface structure morphology(pyramid,cylinder,spherical array)and height on the output performance was discussed.The TENG with pyramidal array(height 1000?m)surface structure has the best output performance,with a sensitivity of 1.0 V/kpa-1 and a pressure response range of 0-24 KPa.(2)The temperature sensing unit was prepared and characterized,and the Poly(vinylidene fluoride)PVDF film with Ag electrode was selected as the temperature sensing material.The temperature response performance of the prepared device was tested,in which the temperature response range was 0-70?,the temperature voltage correlation coefficient R2 was 0.96,and the response time was 450 ms.(3)The 3×3(1×1 cm~2),2×2(2.4×2.4 mm~2)and 4×4(1×1cm~2)pressure and temperature sensing arrays were prepared by adjusting the density of Ag electrode/triboelectric layer on PET substrate and combining with the design of the triboelectric layer size of Ecoflex.Finally,the application and performance of the sensor array are tested,And the sensor array is tracked by finger movement,and the application and performance test of finger tactile perception are simulated.The experimental results show that the dual-mode flexible sensor array can simultaneously detect the distribution and size of pressure and temperature,and has excellent sensing performance.The sensor array has broad prospects in human-computer interaction,intelligent robot and other applications..