Flexible Capacitive Pressure Sensor Based On Nanofibrous Dielectric Layer And Microsphere Array Electrodes

With the continuous development of the Internet of Things era,sensors have received widespread attention due to their ability to collect and process external information.Among them,capacitive pressure sensors play a very important role in industry,medical treatment,production,and life.However,most of the pressure sensors are made of materials such as metal and plastic,which are large in size,high in hardness,and unstable in performance due to changes in the external environment,and cannot well meet the needs of current social development.In order to better meet this need,R&D personnel have developed a flexible capacitive pressure sensor,which has the advantages of good stretchability,non-toxic and harmless,high sensitivity,short response time,good stability,and Very strong development potential.This article mainly introduces a flexible capacitive pressure sensor based on nanofiber dielectric layer materials(PVDF and TPU)and microsphere array gold electrodes.Under the action of pressure,the gold electrode with the microsphere structure will be squeezed with the dielectric layer and deformed,thereby increasing the relative area between the electrodes and also changing the thickness of the dielectric layer.The air in the nanofiber dielectric layer will be removed under pressure,resulting in a change in the dielectric constant,which increases the capacitance change rate of the sensor.The COMSOL software is used to simulate the deformation of the nano-fibrous dielectric layer under pressure,and theoretically calculate the capacitance change rate of the sensor.Finally,in this paper,a flexible capacitive pressure sensor based on nanofibrous dielectric layer and microsphere array electrode was prepared and its performance was characterized.The first chapter of this article introduces the characteristics of various flexible pressure sensors and the development status of flexible capacitive pressure sensors.The second chapter introduces the simulation of the deformation of the nanofiber dielectric layer under pressure based on the COMSOL software,and calculates the relative change rate of sensor capacitance?C/C₀.The third chapter introduces the experimental steps of preparing this sensor,and experimentally characterizes the performance of the sensor.The last chapter summarizes the development status of this flexible capacitive pressure sensor and puts forward the future prospects of the flexible capacitive pressure sensor.