Structure Optimization And Control System Development Of Arc Source For Multi-Arc Ion Plating

PVD(Physical Vapor Deposition)coating technology is an environmentally friendly surface treatment method and thin film material preparation technology that can truly obtain nano-scale to micro-scale coatings without pollution.The film prepared by it can perfectly match various complex working conditions.It is an indispensable craft for all manufacturing industries.Among them,the development of multi-arc ion coating technology is the fastest.It has become one of the most advanced surface treatment and material preparation methods today.The core of the technology is the multi-arc ion source and its supporting technology.At present,the main problems of multi-arc ion plating during work are: large droplet sputtering,poor magnetic field tunability,and low target utilization.Aiming at these problems,this article takes Nanjing Proton Source Engineering Technology Research Institute "the third generation of multi-arc ion coating machine design and development" as the background,and further reduces the large droplet splash phenomenon by redesigning the ion source's magnetic field and optimizing the method of target cooling.Improve the utilization rate of the target material,and develop a control system with a protection system and an automatic process,and verify the feasibility of the plan through experiments.First,according to the arc spot generation mechanism and the influence of different magnetic field configurations on the arc spot movement,the design requirements of the ion source magnetic field are proposed.The relevant magnetic field components of the third generation coating machine ion source are established through Solid Works,and the magnetic field simulation software is used in Mag Net Through the analysis of the magnetic field simulation,it is found that the magnetic field of the new ion source effectively solves the shortcomings of the static magnetic circuit of the traditional ion source.Then through ANSYS simulation,it was found that serious deformation and even cracking of the target material occurred during the ionization process of the target material.Based on this,a cooling method of “near direct cooling” of the target material was proposed.The effect of "direct cooling" verifies the feasibility of this cooling method.Finally,according to the analysis results,the overall control scheme of the multi-arc ion coating machine was determined,and the control system with Mitsubishi PLC and Fame View configuration software as the core was designed.The titanium nitride coating experiment was carried out on the completed multi-arc ion coating machine.The results It shows that the new magnetic field and the "near direct cooling" cooling method can effectively reduce the splashing of large droplets,improve the utilization rate of the target material,and optimize the overall performance of the multi-arc ion coater.