| The development of the artificial intelligence Internet of Things has led to a sharp increase in the demand for portable interconnected electronic devices.At the same time,it has put forward higher requirements for the miniaturization and integration of devices,which has caused a huge demand for micro-energy storage.As one of the forms of micro energy storage,on-chip energy storage is easier to meet the space requirements of integrated micro systems due to its high space utilization per unit area.However,how to obtain an on chip energy storage device with high energy density and power density and excellent cycle performance is an urgent problem to be solved.Current micro-devices mostly use thin-film electrodes and interdigital electrodes as electrodes for energy storage devices.There is a common problem:low surface loading of active materials results in low energy storage density,which cannot meet the requirements of portable electronic devices.Compared with the traditional planar structure of the electrode,the 3D structure of the electrode not only has a larger specific surface area,can increase the active material load,but also has the advantages of relatively short ion and electron transmission paths.Not only that,studies have shown that the ordered 3D array microstructured electrode,due to its structural characteristics,can make the interface ion and current distribution uniform,regulate the electric field distribution,and metal nucleation.This is conducive to solving the problem of dendrites in batteries that use metal as the negative electrode.Ordered microarray structure,uniform ion and current distribution can ensure uniform metal deposition and effectively inhibit dendrite growth.Moreover,the 3D structure can also store more abundant metals,thereby further improving the performance of the device.However,due to the limitations of the micro-manufacturing process,there are still great challenges in manufacturing high-aspect-ratio electrodes that can accommodate more metals in a large area.Therefore,the preparation of large area,high aspect ratio,and orderly 3D electrodes for on chip energy storage devices is an urgent problem for researchers to solve.In this paper,a large-area,high-aspect-ratio,ordered 3D electrode was prepared by simple micromachining technology,and applied to on-chip hybrid capacitors and nickel-zinc alkaline batteries.The main research contents and results are as follows:（1）Through a simple photolithography method,combined with electroless plating and electroplating,a large area,high aspect ratio,and orderly 3D electrode was successfully prepared.（2）On the prepared 3D electrode,the active material is electrodeposited by electroplating to obtain the nickel ordered columnar array/layered nickel-cobalt double metal hydroxide core-shell structure（NOCA/NiCo-LDH）for quasi-solid state on chip hybrid capacitor.The electrochemical performance of the nickel plate electrode and the 3D electrode were compared,and the results showed that the 3D electrode significantly improved the performance of the hybrid capacitor.At the same time,as the plating time increases,the energy density of the 3D electrode also increases accordingly.When the plating time reaches 30 minutes,the best performance is achieved.（3）The NOCA/NiCo-LDH and NOCA/Zn are assembled on chip alkaline nickel-zinc battery.From 1 m A cm-2 to 20 m A cm-2,the capacity can still maintain 60.5%,showing an excellent rate performance.Compared with flat electrodes,3D electrodes effectively suppress zinc dendrites and increase zinc storage capacity. |
